Search Results - "Détalle, M."

Chemical and physical characterization of LaNiO3 thin films deposited by sputtering for top and bottom electrodes in ferroelectric structure by DETALLE, M, REMIENS, D

“…LaNiO3 thin films were deposited by sputtering on Si/SiO2 substrates with and without heating of the substrate holder. Cold-deposited films were crystallized…”
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Piezoelectric thin films for MEMS applications—A comparative study of PZT, 0.7PMN–0.3PT and 0.9PMN–0.1PT thin films grown on Si by r.f. magnetron sputtering by Herdier, Romain, Detalle, M., Jenkins, David, Soyer, Caroline, Remiens, Denis

“…PMN–PT (0.7), PMN–PT (0.9) and PZT (54/46) thin films were deposited by sputtering on silicon substrate covered bottom TiO x /Pt electrodes. The top and lower…”
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The properties of epitaxial PMNT thin films grown on SrTiO3 substrates by HERDIER, R, DETALLE, M, JENKINS, D, REMIENS, D, GREBILLE, Dominique, BOUREGBA, Rachid

“…Thin films of the solid solution lead magnesium niobate with lead titanate (PMNT) have been successfully grown using r.f. magnetron sputtering onto Si/SiO2 and…”
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Nanoscale study by piezoresponse force microscopy of relaxor 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 and 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 thin films grown on platinum and LaNiO3 electrodes by DETALLE, M, FERRI, A, DA COSTA, A, DESFEUX, R, SOYER, C, REMIENS, D

“…Relaxor 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (70/30 PMN-PT) and 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 (90/10 PMN-PT) thin films have been grown by RF-sputtering on platinum…”
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Characterizing nanoscale electromechanical fatigue in Pb(Mg1/3Nb2/3)O3-PbTiO3 thin films by piezoresponse force microscopy by GATOUX, A, FERRI, A, DETALLE, M, REMIENS, D, DESFEUX, R

“…Fatigue of piezoelectric properties was investigated at the grain scale using piezoresponse force microscopy in 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-PT) thin…”
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Comparison of structural and electrical properties of PMN-PT films deposited on Si with different bottom electrodes by Detalle, M., Wang, G., Rémiens, D., Ruterana, P., Roussel, P., Dkhil, B.

“…PMN-PT (70/30) thin films were deposited by sputtering on silicon substrate covered with different bottom electrodes: TiO x /Pt and LaNiO 3 (LNO). The bilayers…”
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Active-lite interposer for 2.5 & 3D integration by Hellings, G., Scholz, M., Detalle, M., Velenis, D., de Potter de ten Broeck, M., Roda Neve, C., Li, Y., Van Huylenbroek, S., Chen, S.-H, Marinissen, E.-J, La Manna, A., Van der Plas, G., Linten, D., Beyne, E., Thean, A.

“…Adding functionality to a passive Si interposer used in 2.5/3D integration, can result in system cost reductions. In this work, active components (diodes, BJT,…”
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High density, low leakage Back-End 3D capacitors for mixed signals applications by Detalle, M., Barrenetxea, M., Muller, P., Potoms, G., Phommahaxay, A., Soussan, P., Vaesen, K., De Raedt, W.

“…ITRS 2018 compliant capacitors have been developed with low-cost anodic Ta 2O 5 material. High capacitance values and very low leakages have been obtained on…”
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NANOSCALE INVESTIGATIONS OF ELECTRICAL PROPERTIES IN RELAXOR Pb(Mg1/3Nb2/3)O3-PbTiO3 THIN FILMS DEPOSITED ON PLATINUM AND LaNiO3 ELECTRODES BY MEANS OF LOCAL PIEZOELECTRIC RESPONSE by FERRI, A., DA COSTA, A., DESFEUX, R., DETALLE, M., WANG, G. S., RèMIENS, D.

“…At very low temperature (450°C), (111)-oriented and polycrystalline 0.7Pb(Mg 1/3 Nb 2/3 ) O 3 -0.3PbTiO 3 (PMN-PT) thin films have been grown on platinum (Pt)…”
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Local Piezoelectric Hysteresis Loops for the Study of Electrical Properties of 0.7Pb(Mg1/3Nb2/ 3)O3-0.3PbTiO3 Thin Films: Bottom Electrode Dependence and Film Thickness Effect by Ferri, A., Da Costa, A., Saitzek, S., Desfeux, R., Detalle, M., Wang, G. S., Remiens, D.

“…0.7Pb(Mg 1/3 Nb 2/3 )O 3 -0.3PbTiO 3 (PMN-PT 70/30) thin films, 400 and 600 nm thick, have been grown on Pt and LaNiO 3 (LNO) bottom electrodes by rf magnetron…”
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INTERFACIAL EFFECTS ON THE CRYSTALLIZATION TEMPERATURE OF PMN-PT FILMS DEPOSITED ON LNO OR Pt BOTTOM ELECTRODES by Detalle, M., Nguyen, T. T., Wang, G. S., Remiens, D.

“…PMN-PT (70/30) thin films were deposited by rf magnetron sputtering on silicon substrate. Two types of bottom electrodes were studied: classical TiO x /Pt and…”
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STUDIES OF SOME DOPANTS: EFFECT OF Mn, Mg, F on (Ba, Sr)PZT FILMS PIEZOELECTRIC RESPONSE FOR SPECIFIC MEMS APPLICATIONS by Nguyen, Thu Trang, Detalle, M., Rémiens, D., Lebrun, L., Guyomar, D.

“…For its use in power transducers for sonars, ultrasonic welding or cleaning systems, PZT is often subjected to high mechanical or temperature resulting in a…”
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Annealing Temperature Effects on PMN-PT Thin Film by Detalle, M., Wang, G. S., Fribourg-Blanc, E., Rémiens, D.

“…Annealing temperature effects on PMN-PT structural, dielectric, ferroelectric and electromechanical properties have been investigated. PMN-PT thin films…”
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Electrostrictive and Piezoelectric Behavior of PMN-PT Thin Films by Detalle, M., Herdier, R., Wang, G. S., Remiens, D., Roussel, P., Fribourg-Blanc, E.

“…The piezoelectric and elestrostrictive properties of (1 - x) PMN- x PT thin films with compositions 90/10 and 70/30 have been investigated. These materials…”
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The properties of epitaxial PMNT thin films grown on SrTiO 3 substrates by Herdier, R., Détalle, M., Jenkins, D., Remiens, D., Grébille, Dominique, Bouregba, Rachid

“…Thin films of the solid solution lead magnesium niobate with lead titanate (PMNT) have been successfully grown using r.f. magnetron sputtering onto Si/SiO 2…”
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Analysis of 3D interconnect performance: Effect of the Si substrate resistivity by Sun, X., Van der Plas, G., Detalle, M., Beyne, E.

“…3D technologies provide promising solutions to meet the needs of today's high performance and high speed ICs. Therefore, a methodology is required to model,…”
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Chemical and physical characterization of LaNiO 3 thin films deposited by sputtering for top and bottom electrodes in ferroelectric structure by Detalle, M., Rémiens, D.

“…LaNiO 3 thin films were deposited by sputtering on Si/SiO 2 substrates with and without heating of the substrate holder. Cold-deposited films were crystallized…”
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Processing active devices on Si interposer and impact on cost by Velenis, D., Detalle, M., Hellings, G., Scholz, M., Marinissen, E. J., Van der Plas, G., La Manna, A., Miller, A., Linten, D., Beyne, E.

“…Enhancing the functionality of interposer substrates by incorporating low-cost active devices is investigated in this paper. Different processing options for…”
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Active-lite interposer for 2.5 & 3D integration by Hellings, G., Scholz, M., Detalle, M., Velenis, D., de Potter de ten Broeck, M., Neve, C. Roda, Li, Y., Van Huylenbroek, S., Chen, S.-H, Marinissen, E.-J, La Manna, A., Van der Plas, G., Linten, D., Beyne, E., Thean, A.

“…Adding functionality to a passive Si interposer used in 2.5/3D integration, can result in system cost reductions. In this work, active components (diodes, BJT,…”
Get full text

Characterizing nanoscale electromechanical fatigue in Pb(Mg 1/3Nb 2/3)O 3-PbTiO 3 thin films by piezoresponse force microscopy by Gatoux, A., Ferri, A., Detalle, M., Rémiens, D., Desfeux, R.

“…Fatigue of piezoelectric properties was investigated at the grain scale using piezoresponse force microscopy in 0.7Pb(Mg 1/3Nb 2/3)O 3-0.3PbTiO 3 (PMN-PT) thin…”
Get full text