Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications

Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications

This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and f...

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Bibliographic Details
Published in:TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference pp. 2259 - 2262
Main Authors: Klejwa, N., Harjee, N., Kwon, R., Coulthard, S.M., Pruitt, B.L.
Format: Conference Proceeding
Language:English
Published: IEEE 01-06-2007
Subjects:
Adhesives
Biosensors
Capacitive sensors
Chromium
Force measurement
Force Sensor
Force sensors
Gold
Mechanical sensors
Sensor arrays
Strain Gauge
Strain measurement
SU-8
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Summary:This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies ( Drosophila melanogaster ), including: 1μN force sensitivity, >25μN range, and bio-compatibility By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing.
ISBN:9781424408412
1424408415
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300619