Search Results - "Clews, P. J."
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In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
Published in Sensors and actuators. A. Physical. (01-07-2008)“…We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some…”
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Journal Article -
2
The influence of coating structure on micromachine stiction
Published in Tribology letters (01-01-2001)“…Stiction and friction in micromachines is commonly inhibited through the use of silane coupling agents such as 1H-, 1H-, 2H-, 2H-perfluorodecyltrichlorosilane…”
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3
Back-contacted and small form factor GaAs solar cell
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01-06-2010)“…We present a newly developed microsystem enabled, back-contacted, shade-free GaAs solar cell. Using microsystem tools, we created sturdy 3 μm thick devices…”
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Conference Proceeding -
4
Silicon carbide lateral overtone bulk acoustic resonator with ultrahigh quality factor
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01-01-2011)“…This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists of an aluminum nitride (AlN) transducer coupled to a suspended thin…”
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Conference Proceeding -
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The role of van der Waals forces in adhesion of micromachined surfaces
Published in Nature materials (01-08-2005)“…Interfacial adhesion and friction are important factors in determining the performance and reliability of microelectromechanical systems. We demonstrate that…”
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Journal Article -
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Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-2000)“…We have developed a new process for applying a hydrophobic, low adhesion energy coating to microelectromechanical (MEMS) devices. Monolayer films are…”
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7
Ultrathin Flexible Crystalline Silicon: Microsystems-Enabled Photovoltaics
Published in IEEE journal of photovoltaics (01-07-2011)“…We present an approach to create ultrathin (<;20 μm) and highly flexible crystalline silicon sheets on inexpensive substrates. We have demonstrated silicon…”
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Ultrathin flexible crystalline silicon: Microsystems enabled photovoltaics
Published in 2011 37th IEEE Photovoltaic Specialists Conference (01-06-2011)“…Summary form only given. Reducing the thickness of crystalline silicon wafers has evolved in the solar industry. As of 2010, most of the silicon solar cell…”
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Conference Proceeding -
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Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2012)“…The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is…”
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Conference Proceeding -
10
Measuring and modeling electrostatic adhesion in micromachines
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…We measure deformations of electrostatically actuated cantilever beams adhered to a substrate and compare results to numerical simulations. Beams are peroxide…”
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Conference Proceeding