Search Results - "Clews, P J"
-
1
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
Published in Sensors and actuators. A. Physical. (01-07-2008)“…We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some…”
Get full text
Journal Article -
2
The influence of coating structure on micromachine stiction
Published in Tribology letters (01-01-2001)“…Stiction and friction in micromachines is commonly inhibited through the use of silane coupling agents such as 1H-, 1H-, 2H-, 2H-perfluorodecyltrichlorosilane…”
Get full text
Journal Article -
3
Back-contacted and small form factor GaAs solar cell
Published in 2010 35th IEEE Photovoltaic Specialists Conference (01-06-2010)“…We present a newly developed microsystem enabled, back-contacted, shade-free GaAs solar cell. Using microsystem tools, we created sturdy 3 μm thick devices…”
Get full text
Conference Proceeding -
4
Silicon carbide lateral overtone bulk acoustic resonator with ultrahigh quality factor
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01-01-2011)“…This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists of an aluminum nitride (AlN) transducer coupled to a suspended thin…”
Get full text
Conference Proceeding -
5
The role of van der Waals forces in adhesion of micromachined surfaces
Published in Nature materials (01-08-2005)“…Interfacial adhesion and friction are important factors in determining the performance and reliability of microelectromechanical systems. We demonstrate that…”
Get full text
Journal Article -
6
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-2000)“…We have developed a new process for applying a hydrophobic, low adhesion energy coating to microelectromechanical (MEMS) devices. Monolayer films are…”
Get full text
Journal Article -
7
Ultrathin Flexible Crystalline Silicon: Microsystems-Enabled Photovoltaics
Published in IEEE journal of photovoltaics (01-07-2011)“…We present an approach to create ultrathin (<;20 μm) and highly flexible crystalline silicon sheets on inexpensive substrates. We have demonstrated silicon…”
Get full text
Journal Article -
8
Ultrathin flexible crystalline silicon: Microsystems enabled photovoltaics
Published in 2011 37th IEEE Photovoltaic Specialists Conference (01-06-2011)“…Summary form only given. Reducing the thickness of crystalline silicon wafers has evolved in the solar industry. As of 2010, most of the silicon solar cell…”
Get full text
Conference Proceeding -
9
Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2012)“…The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is…”
Get full text
Conference Proceeding -
10
Measuring and modeling electrostatic adhesion in micromachines
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…We measure deformations of electrostatically actuated cantilever beams adhered to a substrate and compare results to numerical simulations. Beams are peroxide…”
Get full text
Conference Proceeding