Search Results - "Clement, Marta"

Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination by Carmona-Cejas, José Manuel, Mirea, Teona, Hervás-García, Ricardo, Olivares, Jimena, Clement, Marta

“…Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low…”
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Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films by Carmona-Cejas, José Manuel, Mirea, Teona, Nieto, Jesús, Olivares, Jimena, Felmetsger, Valery, Clement, Marta

“…This work presents a study on the homogeneity and thermal stability of Al0.7Sc0.3N films sputtered from Al-Sc segmented targets. The films are sputtered on Si…”
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Growth of carbon nanotube forests on metallic thin films by Olivares, Jimena, Mirea, Teona, Díaz-Durán, Bárbara, Clement, Marta, DeMiguel-Ramos, Mario, Sangrador, Jesús, de Frutos, José, Iborra, Enrique

“…Growing carbon nanotube (CNT) forests on metals for integrated circuits interconnections or active layers applications is currently a challenge. CNT forests…”
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Resistive switching in manganite/graphene hybrid planar nanostructures by Rocci, Mirko, Tornos, Javier, Rivera-Calzada, Alberto, Sefrioui, Zouhair, Clement, Marta, Iborra, Enrique, Leon, Carlos, Santamaria, Jacobo

“…We report on the fabrication and magnetotransport characterization of hybrid graphene-based nanodevices with epitaxial nanopatterned La0.7Sr0.3MnO3 manganite…”
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Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors by Olivares, Jimena, Mirea, Teona, Gordillo-Dagallier, Lorena, Marco, Bruno, Escolano, José Miguel, Clement, Marta, Iborra, Enrique

“…We present the successful growth of few-layer graphene on top of AlN-based solidly mounted resonators (SMR) using a low-temperature chemical vapour deposition…”
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Assessment of the Absolute Mass Attachment to an AlN-based Solidly Mounted Resonator Using a Single Shear Mode by Mirea, Teona, Clement, Marta, Olivares, Jimena, Iborra, Enrique

“…We prove the ability of a gravimetric sensor consisting in an AlN-based solidly mounted resonator (SMR) operating in the shear mode to decouple mass detection…”
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Homogeneity and Thermal Stability of Sputtered Al 0.7 Sc 0.3 N Thin Films by Carmona-Cejas, José Manuel, Mirea, Teona, Nieto, Jesús, Olivares, Jimena, Felmetsger, Valery, Clement, Marta

“…This work presents a study on the homogeneity and thermal stability of Al Sc N films sputtered from Al-Sc segmented targets. The films are sputtered on Si…”
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Homogeneity and Thermal Stability of Sputtered Al[sub.0.7]Sc[sub.0.3]N Thin Films by Carmona-Cejas, José Manuel, Mirea, Teona, Nieto, Jesús, Olivares, Jimena, Felmetsger, Valery, Clement, Marta

“…This work presents a study on the homogeneity and thermal stability of Al[sub.0.7]Sc[sub.0.3]N films sputtered from Al-Sc segmented targets. The films are…”
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Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator by DeMiguel-Ramos, Mario, Díaz-Durán, Bárbara, Escolano, José-Miguel, Barba, Mariano, Mirea, Teona, Olivares, Jimena, Clement, Marta, Iborra, Enrique

“…We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying…”
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Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content by Iborra, Enrique, Capilla, Jose, Olivares, Jimena, Clement, Marta, Felmetsger, Valeriy

“…In this work we present the assessment of the structural and piezoelectric properties of Al (0.5-x) Ti x N 0.5 compounds (titanium content <;6% atomic), which…”
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Gravimetric biosensor based on a 1.3GHz AlN shear-mode solidly mounted resonator by DeMiguel-Ramos, Mario, Díaz-Durán, Bárbara, Escolano, José-Miguel, Barba, Mariano, Mirea, Teona, Olivares, Jimena, Clement, Marta, Iborra, Enrique

“…We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying…”
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Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films by Iborra, Enrique, Olivares, Jimena, Clement, Marta, Capilla, Jose, Felmetsger, Valeriy, Mikhov, Mikhail

“…In this paper we analyze the effects of doping AlN films with vanadium and tantalum to concentrations up to 6% atomic. The structure and composition of the new…”
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Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors by DeMiguel-Ramos, M., Diaz-Duran, Barbara, Munir, Junaid, Clement, Marta, Mirea, Teona, Olivares, Jimena, Iborra, Enrique

“…Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In…”
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Influence of crystal quality on the excitation and propagation of surface and bulk acoustic waves in polycrystalline AlN films by Clement, Marta, Olivares, J., Capilla, J., Sangrador, J., Iborra, E.

“…We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the…”
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High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors by Capilla, J., Olivares, J., Clement, M., Sangrador, J., Iborra, E., Devos, A.

“…This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors…”
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Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing by Bruno Marco, Lorena Gordillo, José Miguel Escolano, Jimena Olivares, Marta Clement, Diego Mejias, Enrique Iborra

“…We present the successful integration of graphene on top of AlN-based solidly mounted resonators (SMRs), using a low temperature CVD process and Ni layers as…”
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Integration and Bio-Functionalization of Vertically Aligned Carbon Nanotube Forests on High Frequency AlN Gravimetric Sensors by José Miguel Escolano, Bruno Marco, Teona Mirea, Jimena Olivares, Marta Clement, Diego Megias, Enrique Iborra

“…In this work, we grow different types of carbon nanotube (CNT) forests directly on AlN-based electroacoustic biosensors and study their functionalization…”
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Sputtered SiO2 as low acoustic impedance material for Bragg mirror fabrication in BAW resonators by Olivares, J., Wegmann, E., Capilla, J., Iborra, E., Clement, M., Vergara, L., Aigner, R.

“…In this paper we describe the procedure to sputter low acoustic impedance SiO 2 films to be used as a low acoustic impedance layer in Bragg mirrors for BAW…”
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Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications by Iborra, E., Olivares, J., Clement, M., Vergara, L., Sanz-Hervás, A., Sangrador, J.

“…In this work we investigate the suitability of piezoelectric aluminium nitride (AlN) films deposited by RF sputtering as the actuating element in…”
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DCS Tx filters using AlN resonators with iridium electrodes by Clement, M., Iborra, E., Olivares, J., Rimmer, N., Giraud, S., Bila, S., Reinhardt, A.

“…In this paper we present the design, fabrication technology, and characterization of BAW filters for the Digital Cellular System (DCS) Tx-band at 1.75 GHz. The…”
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