Search Results - "Ci-Moo Song"

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  1. 1

    Two-Input Axis Angular Rate Sensor by An, Seungdo, Oh, Yongsoo, Choi, Sang-on, Song, Ci-moo

    Published in Japanese Journal of Applied Physics (01-12-1998)
    “…A vibrating angular rate sensor is developed by the polysilicon surface micromachining process. The 7.0 µm-thick polysilicon layer is deposited by low-pressure…”
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    Journal Article
  2. 2

    ELECTRICAL PROPERTIES OF MG DOPED (Ba0.5Sr0.5)TiO3 THIN FILMS by Yoon, K H, Lee, J C, Park, J, Kang, D H, Song, C M, Seo, Y G

    “…The microstructures and electrical characteristics of Mg doped (Ba0.5Sr0.5)TiO3 (BSTM) thin films were investigated as a function of Mg content. Also the…”
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    Journal Article
  3. 3

    A novel low-loss wafer-level packaging of the RF-MEMS devices by PARK, Yun-Kwon, PARK, Heung-Woo, LEE, Duck-Jung, PARK, Jung-Ho, SONG, In-Sang, KIM, Chung-Woo, SONG, Ci-Moo, LEE, Yun-Hi, KIM, Chul-Ju, JU, Byeong-Kwon

    “…In this work, the flip-chip method was used for packaging an RF-MEMS switch on a quartz substrate with low losses. 4-inch Pyrex glass was used as a package…”
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    Conference Proceeding
  4. 4
  5. 5

    Electrical Properties of Mg Doped (Ba 0.5 Sr 0.5 )TiO 3 Thin Films by Hyun Yoon, Ki, Chan Lee, Jae, Heon Kang, Jihoon Park, Moo Song, Ci, Gyo Seo, Yong

    Published in Japanese Journal of Applied Physics (01-09-2001)
    “…The microstructures and electrical characteristics of Mg doped (Ba 0.5 Sr 0.5 )TiO 3 (BSTM) thin films were investigated as a function of Mg content. Also the…”
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    Journal Article
  6. 6

    Two-Input.axis Angular Rate Sensor by Seungdo An, Yongsoo Oh, Sang-on Choi, Ci-Moo Song

    “…The dual-axis angular rate sensor is fabricated by surface micromachining process. The 7.0 mum thick polysilicon layer deposited by LPCVD is used for…”
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    Conference Proceeding