Search Results - "Ci-Moo Song"
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Two-Input Axis Angular Rate Sensor
Published in Japanese Journal of Applied Physics (01-12-1998)“…A vibrating angular rate sensor is developed by the polysilicon surface micromachining process. The 7.0 µm-thick polysilicon layer is deposited by low-pressure…”
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Journal Article -
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ELECTRICAL PROPERTIES OF MG DOPED (Ba0.5Sr0.5)TiO3 THIN FILMS
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 9B, pp. 5497-5500. 2001 (2001)“…The microstructures and electrical characteristics of Mg doped (Ba0.5Sr0.5)TiO3 (BSTM) thin films were investigated as a function of Mg content. Also the…”
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Journal Article -
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A novel low-loss wafer-level packaging of the RF-MEMS devices
Published in Proceedings, IEEE micro electro mechanical systems (2002)“…In this work, the flip-chip method was used for packaging an RF-MEMS switch on a quartz substrate with low losses. 4-inch Pyrex glass was used as a package…”
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Conference Proceeding -
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Electrical Properties of Mg Doped (Ba 0.5 Sr 0.5 )TiO 3 Thin Films
Published in Japanese Journal of Applied Physics (01-09-2001)“…The microstructures and electrical characteristics of Mg doped (Ba 0.5 Sr 0.5 )TiO 3 (BSTM) thin films were investigated as a function of Mg content. Also the…”
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Journal Article -
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Two-Input.axis Angular Rate Sensor
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)“…The dual-axis angular rate sensor is fabricated by surface micromachining process. The 7.0 mum thick polysilicon layer deposited by LPCVD is used for…”
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Conference Proceeding