Search Results - "Chu, P.B."

Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning by Ju-Il Lee, Xinghui Huang, Chu, P.B.

“…This paper presents a microelectromechanical systems (MEMS) capacitive position sensor for nanopositioning applications in Probe storage systems. The objective…”
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Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch by Chu, P.B., Brener, I., Chuan Pu, Shi-Sheng Lee, Dadap, J.I., Sangtae Park, Bergman, K., Bonadeo, N.H., Chau, T., Ming Chou, Doran, R.A., Gibson, R., Harel, R., Johnson, J.J., Lee, C.D., Peale, D.R., Bo Tang, Tong, D.T.K., Ming-Ju Tsai, Qi Wu, Zhong, W., Goldstein, E.L., Lin, L.Y., Walker, J.A.

“…In this paper, we demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in an optical cross-connect. We…”
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Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes by Chuan Pu, Sangtae Park, Chu, P.B., Shi-Sheng Lee, Ming Tsai, Peale, D., Bonadeo, N.H., Brener, I.

“…We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The…”
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Modular MEMS-based optical cross-connect with large port-count by Dadap, J.I., Chu, P.B., Brener, I., Pu, C., Lee, C.D., Bergman, K., Bonadeo, N., Chau, T., Chou, M., Doran, R., Gibson, R., Harel, R., Johnson, J.J., Lee, S.S., Park, S., Peale, D.R., Rodriguez, R., Tong, D., Tsai, M., Wu, C., Zhong, W., Goldstein, E.L., Lin, L.Y., Walker, J.A.

“…We describe and demonstrate a modular microelectromechanical systems (MEMS)-based optical cross-connect (OXC) architecture. The OXC port count increases…”
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MEMS: the path to large optical crossconnects by Chu, P.B., Shi-Sheng Lee, Sangtae Park

“…Continuous growth in demand for optical network capacity and the sudden maturation of WDM technologies have fueled the development of long-haul optical network…”
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Isolation of the V-ATPase A and c subunit cDNAs from mosquito midgut and Malpighian tubules by Gill, S.S, Chu, P.B, Smethurst, P, Pietrantonio, P.V, Ross, L.S

“…Using conserved amino acid sequences for the design of oligo-nucleotide primers, we isolated cDNA clones for two subunits of the V-ATPase from the midgut and…”
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Analysis of closed-loop control of parallel-plate electrostatic microgrippers by Chu, P.B., Pister, S.J.

“…A design of a high-force-output large-deflection parallel-plate electrostatically actuated microgripper is described. This design uses polysilicon as a…”
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Sliding Contact Micro-Bearing for Nano-Precision Sensing and Positioning by Ramakrishnan, N., Johns, E.C., Yongjun Zhao, Kiely, J.D., Bedillion, M.D., Chu, P.B.

“…Applications involving sub-nanometer, relative, in-plane motion between two substrates require precise control of gap-spacing between substrates for, both…”
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Spinstand control characterization of an electromagnetic slider microactuator by Bedillion, M.D., Karaman, M., Chu, P.B.

“…Increasing areal densities in disc drives require high performance servo tracking systems to attenuate runout. High bandwidth, large stroke microactuators are…”
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Optical communication using micro corner cube reflectors by Chu, P.B., Lo, N.R., Berg, E.C., Pister, K.S.J.

“…Surface micromachined corner cube reflectors made of 250 /spl mu/m square hinged polysilicon plates have been demonstrated to transmit digital signals over a…”
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Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators by Chu, P.B., Nelson, P.R., Tachiki, M.L., Pister, K.S.J.

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Controlled pulse-etching with xenon difluoride by Chu, P.B., Chen, J.T., Yeh, R., Lin, G., Huang, J.C.P., Warneke, B.A., Pister, S.J.

“…A gas-phase, room-temperature, plasmaless isotropic etching system has been used for bulk and thin film silicon etching. A computer controlled multi-chambered…”
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350/spl times/350 modular optical cross-connect with closed-loop controlled MEMS mirrors by Chu, P.B., Dadap, J.I., Lee, C.D., Brener, I., Tsai, M., Pu, C., Peale, D., Harel, R., Wu, C., Lee, S., Rodriguez, R., Johnson, J., Park, S., Tong, D., Chou, M., Doran, R., Bergman, K., Bonadeo, N., Chau, T., Zhong, W., Gibson, R., Goldstein, E., Lin, L., Walker, J.A.

“…We describe a modular MEMS based optical cross-connect switch. Each module has 16 ports with closed-loop servo-controlled mirrors. We have achieved switching…”
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Adapting multichip module foundries for MEMS packaging by Butler, J.T., Bright, V.M., Chu, P.B., Saia, R.J.

“…Methods of packaging micro-electro-mechanical systems (MEMS) using advanced multichip module (MCM) foundry processes are described. MCM packaging provides an…”
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