Search Results - "Choon Yap Koh"
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Simulation Analysis on the Impact of Furnace Batch Size Increase in a Deposition Loop
Published in Proceedings of the 2006 Winter Simulation Conference (01-12-2006)“…In the dynamic environment of semiconductor manufacturing operations, a bottleneck could be created at the bake furnaces of the deposition loop as capacity…”
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Conference Proceeding
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2
Simulation analysis on the impact of furnace batch size increase in a deposition loop
Published in Proceedings of the 38th conference on Winter simulation (03-12-2006)“…In the dynamic environment of semiconductor manufacturing operations, a bottleneck could be created at the bake furnaces of the deposition loop as capacity…”
Get full text
Conference Proceeding