Search Results - "Chok, K.L."
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Stress-induced voiding in multi-level copper/low-k interconnects
Published in 2004 IEEE International Reliability Physics Symposium. Proceedings (2004)“…Stress-induced voiding phenomenon in vias at different metallization layers was studied in details with stress temperatures ranging from 150/spl deg/C to…”
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Conference Proceeding -
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A technology development SRAM approach with DFM considerations
Published in 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) (2000)“…A technology development SRAM (TDSRAM/sup TM/) has been highly effective in rapid process technology development, debug, and yield ramp on an advanced CMOS,…”
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Conference Proceeding