Search Results - "Chintala, C."

  • Showing 1 - 2 results of 2
Refine Results
  1. 1
  2. 2

    The unexpected effects of crystallization on Ta sub(2)O sub(5) as studied by HRTEM and C-AFM by Celano, U, Chintala, R C, Adelmann, C, Richard, O, Vandervorst, W

    Published in Microelectronic engineering (01-09-2013)
    “…In this work, we observe the morphological and electrical changes induced in poly-crystalline Ta sub(2)O sub(5) upon thermal treatment. The correlation between…”
    Get full text
    Journal Article