Effect of Heat Treatment on the Stability of Nanosized (Co40Fe40B20)34(SiO2)66/ZnO/In2O3 Multilayers

Effect of Heat Treatment on the Stability of Nanosized (Co40Fe40B20)34(SiO2)66/ZnO/In2O3 Multilayers

An investigation is performed of the thermal stability and phase transformations of thin-film heterogeneous [(Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 /ZnO/In 2 O 3 ] 85 multilayers obtained via ion beam sputtering. The system contains 85 layers, each consisting of a (Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 comp...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics Vol. 84; no. 9; pp. 1100 - 1103
Main Authors: Babkina, I. V., Volochaev, M. N., Zhilova, O. V., Kalinin, Yu. E., Kashirin, M. A., Sitnikov, A. V., Chehonadskih, M. V., Yanchenko, L. I.
Format: Journal Article
Language:English
Published: Moscow Pleiades Publishing 01-09-2020
Springer Nature B.V
Subjects:
Hadrons
Heat treating
Heat treatment
Heavy Ions
Indium oxides
Ion beam sputtering
Multilayers
Nuclear Physics
Phase transitions
Physics
Physics and Astronomy
Silicon dioxide
Thermal stability
Thermal transformations
Thin films
Zinc oxide
Zinc silicates
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Summary:An investigation is performed of the thermal stability and phase transformations of thin-film heterogeneous [(Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 /ZnO/In 2 O 3 ] 85 multilayers obtained via ion beam sputtering. The system contains 85 layers, each consisting of a (Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 composite layer and ZnO and In 2 O 3 semiconductor spacers. The sample structure in the initial state and after heat treatment is studied by means of X-ray diffraction. It is shown that the samples are stable at temperatures of up to 500°С. Zn 2 SiO 4 , InBO 3 , CoFe, and In 2 O 3 phases form during annealing.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873820090051