Search Results - "Cheemalamarri, Hemanth Kumar"
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Room Temperature Plasma-Enhanced Niobium-Niobium Wafer Bonding for 3D Integration of Superconducting Interconnects for Quantum Processing
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Quantum computing relies on a blend of superposition and entanglement phenomena of qubit devices to solve problems. It promises unparalleled computational…”
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Study of Cu Pad Expansion with Surrounding Dielectrics for Hybrid Bonding
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Copper/dielectric hybrid bonding technology is a key enabler for advanced chip-level (chip-to-chip, chip-to-wafer) or wafer-level (wafer-to-wafer)…”
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Diffusion Enhanced Optimized Thin Passivation Layer for Realizing Copper to Copper Wafer Bonding at Low Thermal Budget
Published in 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) (07-12-2022)“…In the last decade, the implementation of three-dimensional integration circuit (3D IC) technology has received much attention in the semiconductor industry…”
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Through Silicon Via Oxide Etch Back for Via-last Integration Scheme
Published in 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) (07-12-2022)“…The TSV technology has become the key driver for advanced electronic packages such as 3D memory and BSI (backside illuminated image) sensor applications. Among…”
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Cu/Dielectric hybrid bonding among Glass and Si
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…Chaplets and advanced packaging technologies play a pivotal role in meeting the diverse and demanding requirements of data-intensive workloads, by offering…”
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Low Thermal Budget Fine-pitch Cu/Dielectric Hybrid Bonding with Cu Microstructure Modifications
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…Advanced packaging featuring vertical integration has emerged as a crucial technology facilitating high performance, low power consumption, and compatibility…”
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Sub-0.5 μm Pitch Scaling of W2W Cu/Dielectric Hybrid Bonding
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…Hybrid bonding, a crucial technique in heterogeneous package integration, holds immense potential for advancing pitch scaling in semiconductor technologies. As…”
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Ultrathin New Dielectric Interlayer Layer - Enhancer for TEOS-TEOS Bond Strength at Low Thermal Budget for C2W and W2W Bonding Applications
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Three-dimensional integrated circuit (3D IC) packaging is becoming promising for automation and high-performance computing applications. High-density…”
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CMOS-Compatible Fine Pitch Al-Al Bonding
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01-05-2023)“…The metal-metal bonding has become more promising for fine-line hermitic sealing and electronic packaging applications. Even though aluminum has CMOS…”
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Conference Proceeding -
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Interface Analysis of High Reliable Hermitic Sealed Microfluidic Channels for Thermal Cooling in 3D ICs
Published in 2019 IEEE 21st Electronics Packaging Technology Conference (EPTC) (01-12-2019)“…Thermal management is the critical issue in all present conventional 2D electronic packages, and is more crucial in the case staked dies of advanced 3D IC…”
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Optimization of the CMP process for direct wafer-to-wafer oxide bonding
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Direct wafer-to-wafer oxide bonding is an efficient method for the 3D integration of heterogeneous or homogeneous substrates and occupies a significant place…”
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Conference Proceeding -
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Achieving of Intensified Conductive Interconnections for Flex-on-Flex by Using Metal Passivated Copper - Copper Thermocompression Bonding
Published in 2018 IEEE 68th Electronic Components and Technology Conference (ECTC) (01-05-2018)“…There is a gradual increase in demand for flexible electronics due to the way it is going to empower the end user - to bent, roll/fold and arrange randomly in…”
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Conference Proceeding