Search Results - "Chaw Sing Ho"
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MIM capacitor integration for mixed-signal/RF applications
Published in IEEE transactions on electron devices (01-07-2005)“…The relentless drive toward high-speed and high-density silicon-based integrated circuits (ICs) has necessitated significant advances in processing technology…”
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Journal Article -
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The study of sputtered RF Ta on the PID in Cu dual damascene technology [plasma induced damage]
Published in IEEE International Integrated Reliability Workshop Final Report, 2004 (2004)“…Different recipes of barrier metal using a sputtered Ta process in 0.13 /spl mu/m dual gate oxide are developed. Low-throughput RF Ta, baseline Ta and…”
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Conference Proceeding -
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