Search Results - "Chaw Sing Ho"

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    MIM capacitor integration for mixed-signal/RF applications by Ng, C.H., Ho, C.-S., Chu, S.-F.S., Sun, S.-C.

    Published in IEEE transactions on electron devices (01-07-2005)
    “…The relentless drive toward high-speed and high-density silicon-based integrated circuits (ICs) has necessitated significant advances in processing technology…”
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    Journal Article
  2. 2

    The study of sputtered RF Ta on the PID in Cu dual damascene technology [plasma induced damage] by Wen Hui Lu, Kim Keng Teo, Chaw Sing Ho, Andrew, K.L.Y., Keng Foo Lo

    “…Different recipes of barrier metal using a sputtered Ta process in 0.13 /spl mu/m dual gate oxide are developed. Low-throughput RF Ta, baseline Ta and…”
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    Conference Proceeding
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