Search Results - "Chang, Yang Sil"

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  1. 1

    Change of salivary stress marker concentrations during pregnancy: Maternal depressive status suppress changes of those levels by Tsubouchi, Hiroaki, Nakai, Yuichiro, Toda, Masahiro, Morimoto, Kanehisa, Chang, Yang Sil, Ushioda, Norichika, Kaku, Shoji, Nakamura, Takafumi, Kimura, Tadashi, Shimoya, Koichiro

    “…Aim:  The aim of the present study was to show changes in salivary cortisol and chromogranin A/protein concentrations as stress markers during pregnancy and to…”
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    Journal Article
  2. 2

    The influence of carbon content in carbon-doped silicon oxide film by thermal treatment by Yang, Chang Sil, Yu, Young-Hun, Lee, Kwang-Man, Lee, Heon-Ju, Choi, Chi Kyu

    Published in Thin solid films (01-07-2003)
    “…Carbon-doped silicon oxide (SiOC) low- k dielectric film was deposited on a p-type Si(100) substrate with mixture of bis-trimethylsilylmethane (BTMSM) and…”
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    Journal Article Conference Proceeding
  3. 3

    Studies on the low dielectric SiOC(–H) thin films deposited using MTMS and oxygen as precursors by UV source assisted PECVD by Yang, Chang Sil, Kannan, Meera, Kyu Choi, Chi

    Published in Surface & coatings technology (21-11-2005)
    “…Low- k SiOC(–H) films were deposited on a p-type Si(100) substrate using ultraviolet (UV) source assisted plasma-enhanced chemical vapor deposition with a…”
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    Journal Article Conference Proceeding
  4. 4
  5. 5

    Investigation of low dielectric carbon-doped silicon oxide films prepared by PECVD using methyltrimethoxysilane precursor by Yang, Chang Sil, Yu, Young Hun, Lee, Kwang-Man, Lee, Heon-Ju, Choi, Chi Kyu

    Published in Thin solid films (26-05-2006)
    “…Carbon-doped silicon oxide (SiOC(-H)) films with low dielectric constant were deposited on a p-type Si(100) substrate using inductively coupled plasma chemical…”
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    Journal Article
  6. 6

    The characteristics of dielectric properties of SiOC film with the variation of bonding angle on the Si-O-C structure by Chang Sil Yang, Young Hun Yu, Chi Kyu Choi

    “…Summary form only given, as follows. Carbon doped silicon oxide (SiOC) with low dielectric films were deposited on a p-type Si(100) substrate using a mixture…”
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    Conference Proceeding
  7. 7

    The characteristics of carbon-doped silicon oxide films with nano-pore structure deposited using UV-assisted PECVD by Yang, Chang Sil, Choi, Chi Kyu

    Published in Thin solid films (26-05-2006)
    “…SiOC(–H) films with low dielectric constant were deposited on p-type Si(100) substrate using ultraviolet (UV)-source assisted plasma-enhanced chemical vapor…”
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    Journal Article
  8. 8

    The effect of the CH4 plasma treatment on deposited SiOC(–H) films with low dielectric constant prepared by using TMS/O2 PECVD by Yang, Chang Sil, Yu, Young Hun, Lee, Heon-Ju, Lee, Kwang-Man, Choi, Chi Kyu

    Published in Thin solid films (22-03-2005)
    “…The low dielectric SiOC(–H) films can be damaged by oxygen plasma during photoresist stripping. In this work, we have studied the CH4 plasma treatment to…”
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    Journal Article
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    Electrical Properties of Low-Dielectric-Constant SiOC(–H) Films Prepared by Plasma-Enhanced Chemical Vapor Deposition from Methyltriethoxysilane and O 2 by Navamathavan, Rangaswamy, Oh, Kyoung Suk, Chang, Sil Yang, Kim, Seung Hyun, Jang, Yong Jun, Jung, An Su, Lee, Heon Ju, Lee, Kwang Man, Choi, Chi Kyu

    Published in Japanese Journal of Applied Physics (01-10-2006)
    “…SiOC(–H) films were deposited on a p -type Si(100) substrate by plasma-enhanced chemical vapor deposition (PECVD) from methyltriethoxysilane (MTES) and oxygen…”
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    Journal Article
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