Search Results - "Chan, Bor"

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    Synthesis and properties of thio-containing poly(ether ether ketone)s by Wang, Yen-Zen, Lin, Chih-Hung, Chan, Bor-Wen, Hsieh, Kuo-Huang

    Published in Polymer international (01-03-2004)
    “…A series of thio‐containing poly(ether ether ketone) (PEESK) polymers was synthesized by the introduction of thio groups from 4,4′ thiodiphenol (TDP) into the…”
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    Journal Article
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    Plasma induced substrate damage in high dose implant resist strip process by Bor-Wen Chan, Baw-Ching Perng, Sheu, L., Yuan-Hung Chiu, Han-Jan Tao

    “…In this communication we report our work on the ashing of post high dosage implant photoresist removal. Attention is focused on plasma damage to the silicon…”
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    Conference Proceeding
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    Notch elimination in polycide gate stack etching for advanced DRAM technology by Bor-Wen Chan, Min-hwa Chi, Liou, Y.H.

    “…The notch phenomenon in etching of complex TEOS/oxynitride/WSi/sub x//poly DRAM gate stacks is eliminated by adding N/sub 2/ gas in the poly over-etch (OE)…”
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    Conference Proceeding
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    Unlocking the Performance of the BlueGene/L Supercomputer by Almasi, George, Chatterjee, Siddhartha, Gara, Alan, Gunnels, John, Gupta, Manish, Henning, Amy, Moreira, Jose E., Walkup, Bob

    “…The BlueGene/L supercomputer is expected to deliver new levels of application performance by providing a combination of good single-node computational…”
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    Conference Proceeding
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    Elimination of notch during gate polycide stack etching by adding nitrogen in over etch step by Bor-Wen Chan, Liou, Y.H., Min-Hwa Chi

    “…In this paper, the notch phenomenon in sub-quarter-micron DRAM polycide gate etching process is an important issue and is improved by adding N/sub 2/ gas in…”
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    Conference Proceeding
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