Search Results - "Catherinot, L."
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A pressure sensor based on a HBAR micromachined structure
Published in 2010 IEEE International Frequency Control Symposium (01-06-2010)“…In this work, we propose a pressure sensor fabricated on compound LiNbO 3 /Silicon/Silicon substrates obtained by Au/Au bonding at room temperature and double…”
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Conference Proceeding -
2
New calibration method for experimental study of nonlinear behavior of Bulk Acoustic Wave resonator with power
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01-07-2013)“…This paper deals with experimental studies of nonlinear behavior of Bulk Acoustic Wave (BAW) devices, in a Solidly Mounted Resonator (SMR) structure. The…”
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Conference Proceeding -
3
BAW pressure sensor on LiNbO3 membrane lapping
Published in EFTF-2010 24th European Frequency and Time Forum (01-04-2010)“…In this paper, we have proposed a new concept for pressure and more generally stress sensors exploiting single-crystal based HBAR. After describing the…”
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Conference Proceeding -
4
Large band-pass BAW filter for space applications
Published in 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings (01-05-2011)“…A resonator using shear waves of lithium niobate is used in this paper to achieve large fractional bandwidth BAW filter. Electromechanical couplings in the 20…”
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Conference Proceeding