Search Results - "Carreno, M.N.P."

Wide optical band gap window layers for solar cells by Yu, Zhenrui, Pereyra, Ines, Carreno, M.N.P.

“…In this paper, the preparation of amorphous silicon carbide with very wide optical band gap and high conductivity were reported. The films were fabricated…”
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Characterization of silicon thin films obtained by MicroHeater MEMS based-microLPCVD technique by Oliveira, R.A.R., Purificacao, D. D., Pereyra, I., Carreno, M.N.P.

“…In this work, results on silicon thin film deposition utilizing a new micro LPCVD technique, based on a MEMS-based microheater device, are presented. This…”
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Electrochemical electrodes based on Laser Induced Graphene on PECVD a-SiC:H and Polyimide by J, Feria D., Pinto, Aline L. M., Bertotti, Mauro, Carreno, M.N.P., Pereyra, I.

“…The formation of graphene with defined patterns is crucial for the fabrication of graphene-based electrochemical devices as well as for different devices in…”
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Development of MEMS based microCVD technique for new materials thin films deposition by Oliveira, R.A.R., Pereyra, I., Carreno, M.N.P.

“…In this work a new approach for deposition of new materials is proposed. In this approach, a CVD (Chemical Vapor Deposition) process is implemented in a micro…”
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Post thermal annealing crystallization and reactive ion etching of SiC films produced by PECVD by Oliveira, A.R., Carreño, M.N.P.

“…Crystallization of a-SiC:H films obtained by PECVD technique at low temperatures and results on corrosion by reactive ion etching (RIE) of these films are…”
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PECVD-SiOxNy films for large area self-sustained grids applications by CARRENO, M. N. P, ALAYO, M. I, PEREYRA, I, LOPES, A. T

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Wide gap a-Si1-xCx: H thin films obtained under starving plasma deposition conditions by PEREYRA, I, CARRENO, M. N. P

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Direct CVD graphene growth onto surgical stainless steel for orthopedic implants by Feria, D.J., de Almeida Filho, Saulo Afonso, Lopes, A.T., Saito, Mateus, Fernandes, Tiago Lazaretti, Carreño, M.N.P., Pereyra, I.

“…Graphene sheets were successfully grown for the first time on the surface of surgical stainless steel cylinders by direct APCVD process using methane, argon…”
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Integration of optical waveguides with micro-incandescent light by Rehder, G., Carreno, M.N.P., Alayo, M.I.

“…In this work, we propose the integration of optical waveguides with a simple light source device. Light is emitted from an incandescent chromium micro-resistor…”
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Laser-induced graphene in flexible PI/PDMS polymer aiming application in pressure sensors by Feria, D.J., Lopes, A.T, Purificacao, D. D., Pereyra, I., Carreno, M.N.P

“…There is a huge field of research involving graphene, both for the study of its properties and on its countless applications. As a result, graphene with…”
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Membranes of SiO xN y with 3D topography formed by PECVD for MEMS applications by Lopes, A.T., Carreño, M.N.P.

“…Self-sustained corrugated membranes with 3D topography are fabricated utilizing low stress silicon oxynitride (SiO x N y ) films obtained by the PECVD…”
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PECVD a-Sic:H Young’s modulus obtained by MEMS resonant frequency by Rehder, G., Carreño, M.N.P.

“…In this paper we study the Young’s modulus of PECVD obtained silicon rich (x>0.5) a-SixC1−x:H thin films through the study of the resonance frequency of free…”
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Thermally actuated a-SiC:H MEMS fabricated by a PECVD process by Rehder, G., Carreño, M.N.P.

“…The fabrication of a fully operational thermally actuated MEMS based on PECVD materials is reported. These micro-electro-mechanical systems consist of matrixes…”
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N and p-type doping of PECVD a-SiC:H obtained under “silane starving plasma” condition with and without hydrogen dilution by Oliveira, A.R., Carreño, M.N.P.

“…N and p-type doping of highly structural and chemically ordered a-Si 0.5C 0.5:H films are studied. Ion implantation is utilized as doping technique and the…”
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p-Type doping in a-Si 1−xC x:H obtained by PECVD by Carreño, M.N.P., Pereyra, I.

“…In previous works we have pointed out the importance of the so-called ‘silane starving plasma’ condition on the optical, chemical and structural properties of…”
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Self-sustained bridges of a-SiC:H films obtained by PECVD at low temperatures for MEMS applications by Carreño, M.N.P., Lopes, A.T.

“…In this work PECVD obtained a-SiC:H films are utilized to fabricate self sustained microbridges and microtunnels. The deposition conditions for these films,…”
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Membranes of SiOxNy with 3D topography formed by PECVD for MEMS applications by Lopes, A.T., Carreño, M.N.P.

“…Self-sustained corrugated membranes with 3D topography are fabricated utilizing low stress silicon oxynitride (SiOxNy) films obtained by the PECVD technique at…”
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Fabrication of PECVD-silicon oxynitride-based optical waveguides by Alayo, M.I., Criado, D., Carreño, M.N.P., Pereyra, I.

“…In this work, we report on the optimization of all process steps for the fabrication of optical waveguides with high index contrast by using as core and…”
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Amorphous and excimer laser annealed SiC films for TFT fabrication by García, B., Estrada, M., Albertin, K.F., Carreño, M.N.P., Pereyra, I., Resendiz, L.

“…The characteristics of hydrogenated amorphous silicon carbide films prepared by PECVD and crystallized by KrF UV excimer laser annealing (ELA), for different…”
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PECVD-SiO xN y films for large area self-sustained grids applications by Carreño, M.N.P, Alayo, M.I, Pereyra, I, Lopes, A.T

“…In this work we study the structural properties and mechanical stress of silicon oxynitride (SiO x N y ) films obtained by plasma enhanced chemical vapor…”
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