Search Results - "Carballo, V.M. Blanco"

Moisture resistance of SU-8 and KMPR as structural material by Blanco Carballo, V.M., Melai, J., Salm, C., Schmitz, J.

“…This paper treats the moisture resistance of SU-8 and KMPR, two photoresists considered as structural material in microsystems. Our experiments focus on the…”
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Spark protection layers for CMOS pixel anode chips in MPGDs by Bilevych, Y., Blanco Carballo, V.M., Chefdeville, M., Colas, P., Delagnes, E., Fransen, M., van der Graaf, H., Koppert, W.J.C., Melai, J., Salm, C., Schmitz, J., Timmermans, J., Wyrsch, N.

“…In this work we have investigated the functioning of high resistivity amorphous silicon and silicon-rich nitride layers as a protection against discharges in…”
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TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector by Bilevych, Y., Carballo, V.M. Blanco, Chefdeville, M., Fransen, M., van der Graaf, H., Salm, C., Schmitz, J., Timmermans, J.

“…This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid…”
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GEMGrid: a wafer post-processed GEM-like radiation detector by Blanco Carballo, V.M., Bilevych, Y., Chefdeville, M., Fransen, M., van der Graaf, H., Salm, C., Schmitz, J., Timmermans, J.

“…This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid. The device consists of a GEM-like structure fabricated…”
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A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material by Blanco Carballo, V.M., Fransen, M., van der Graaf, H., Lu, J., Schmitz, J.

“…We present a new Micro Pattern Gaseous Detector (MPGD) fabricated with nonpolymeric materials. The device structure is similar to a Microbulk Micromegas…”
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Bonding induced distortion in wafer-to-wafer bonding applications: how the scanner and Yieldstar can enable 3D integration by Carballo, V.M. Blanco, Renaud, V., Iacovo, S., Jourdain, A., Hsu, A., Tseng, Y., Tabery, C., De Poortere, E. P.

“…In this work, we have developed a two-layer short loop process on device wafers to study the distortion fingerprint induced by a wafer-to-wafer bonding…”
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Suspended membranes, cantilevers and beams using SU-8 foils by Melai, J., Blanco Carballo, V.M., Salm, C., Schmitz, J.

“…This paper presents a fast, easy and low-cost method to create suspended structures using SU-8 photoresist. The method consists of laminating SU-8 foils on top…”
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Patterning process and electrical yield optimization at the limits of single exposure EUV 0.33 NA: a pitch 26nm damascene process by Carballo, V.M. Blanco, De Wachter, K. Vandersmissen. B., Nafus, K., Feurprier, Y., Thiam, A., Hsu, A., Tabery, C., Doise, J., De Schepper, P.

“…In this work we have developed a single layer short loop damascene process to evaluate and optimize patterning performance of pitch 26nm single exposure 0.33…”
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Pulse height fluctuations of integrated micromegas detectors by Chefdeville, M., van der Graaf, H., Hartjes, F., Timmermans, J., Visschers, J., Blanco Carballo, V.M., Salm, C., Schmitz, J., Smits, S., Colas, P., Giomataris, I.

“…Recent publications report that Micromegas-based detectors exhibit very good energy resolution for gaseous radiation detectors. When made in microtechnology,…”
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On the geometrical design of integrated Micromegas detectors by Blanco Carballo, V.M., Salm, C., Smits, S.M., Schmitz, J., Chefdeville, M., van der Graaf, H., Timmermans, J., Visschers, J.L.

“…This paper presents the operational characteristics of several integrated Micromegas detectors. These detectors called InGrids are made by means of…”
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Charge amplitude distribution of the Gossip gaseous pixel detector by Blanco Carballo, V.M., Chefdeville, M., Colas, P., Giomataris, Y., van der Graaf, H., Gromov, V., Hartjes, F., Kluit, R., Koffeman, E., Salm, C., Schmitz, J., Smits, S.M., Timmermans, J., Visschers, J.L.

“…The Gossip gaseous pixel detector is being developed for the detection of charged particles in extreme high radiation environments as foreseen close to the…”
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Dual Damascene 28nm-Pitch Single Exposure EUV Design Rules Evaluation by Voltage Contrast Characterization by Carballo, V.M. Blanco, Cerbu, D., Schleicher, F., van de Kerkhove, J., Leray, P., Kissoon, N. N., De Poortere, E. P.

“…In this work we have fabricated 28nm-pitch dual damascene structures using EUV single exposure for both via and metal. Ruthenium metallization has been used…”
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New results from GridPix detectors by Bilevych, Y., Blanco Carballo, V.M., Chefdeville, M., Fransen, M., vd Graaf, H., de Groot, N., Hartjes, F., Konig, A., de Nooij, L., Rogers, M., Schmitz, J., Timmermans, J., Visschers, J., Romaniouk, A., Konovalov, S., Morozov, S.

“…GridPix detector prototypes have been made using a TimePix pixel chip and a PSI 46 pixel chip. A system of discharge protection has been successfully tested…”
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Results from MPGDs with a protected timepix or medipix-2 pixel sensor as active anode by Bosma, M., Schmitz, J., Timmermans, J., Visschers, J.L., Wyrsch, N., Blanco Carballo, V.M., Bylevich, Y., Chefdeville, M., Fransen, M., van der Graaf, H., Hartjesa, F., Melai, J., Salm, C.

“…The functioning of a high-resistive, hydrogenated amorphous Silicon layer as a protection against discharges for Micoomegas-based pixel readout gaseous…”
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A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing by Blanco Carballo, V.M., Chefdeville, M., van der Graaf, H., Salm, C., Aarnink, A.A.I., Smits, S.M., Altpeter, D.M., Timmermans, J., Visschers, J.L., Schmitz, J.

“…This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for…”
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Discharge Protection and Ageing of Micromegas Pixel Detectors by Aarts, A.A., Blanco Carballo, V.M., Chefdeville, M., Colas, P., Dunand, S., Fransen, M., van der Graaf, H., Giomataris, Y., Hartjes, F., Koffeman, E., Melai, J., Peek, H., Riegler, W., Salm, C., Schmitz, J., Smits, S.M., Timmermans, J., Visschers, J.L., Wyrsch, N.

“…GridPix is a gas-filled detector in which a Micromegas is combined with a CMOS pixel chip. The GridPix detector, originally developed for the readout of TPCs,…”
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