Search Results - "Camerotto, Elisabeth"

The Influence of Dissolved Carbon Dioxide on Cavitation Intensity in Ultrasound Cleaning Systems by Brems, Steven, Hauptmann, Marc, Camerotto, Elisabeth, Pacco, Antoine, Struyf, Herbert, Mertens, Paul, Gottschalk, Christiane, De Gendt, Stefan

“…A study is made of the effect of dissolved CO 2 on cavitation inception and activity in an ultrasound system with a sound frequency of 928 kHz. It is shown…”
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MP18-26 Ru Direct-Etch Integration Development with Leakage Improvement and Increased Aspect Ratio by Pokhrel, Ankit, Marti, Giulio, O'Toole, Martin, Murdoch, Gayle, Gupta, Anshul, Decoster, Stefan, Kundu, Souvik, Camerotto, Elisabeth, Le, Quoc Toan, Thiam, Arame, Lesniewska, Alicja, Park, Seongho, Tokei, Zsolt

“…Ru semi-damascene has been recently considered as a promising candidate to replace the conventional Cu dual damascene to meet the continued RC scaling needs in…”
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Link between silica-metal agglomeration and high porosity ultra-low k scratch formation during Chemical Mechanical Polishing by Heylen, Nancy, Camerotto, Elisabeth, Volders, Henny, Travaly, Youssef, Vereecke, Guy, Beyer, Gerald P, Tokei, Zsolt

“…Sub-surface hydrophilisation and an increase in effective k is known as damage to a highly porous ultra-low k (ULK) film when removing a metal layer from this…”
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