Search Results - "CAUBET, Pierre"

Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V by PIALLAT, Fabien, BEUGIN, Virginie, GASSILLOUD, Remy, DUSSAULT, Laurent, PELISSIER, Bernard, LEROUX, Charles, CAUBET, Pierre, VALLEE, Christophe

“…Plasma enhanced atomic layer deposition (PEALD) TaCN deposited on HfO2 was studied by X-ray photoelectron spectroscopy (XPS) to understand the reactions taking…”
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Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break by Piallat, Fabien, Gassilloud, Remy, Caubet, Pierre, Vallée, Christophe

“…Due to the reduction of the thickness of the layers used in the advanced technology nodes, there is a growing importance of the surface phenomena in the…”
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A review of the mechanical stressors efficiency applied to the ultra-thin body & buried oxide fully depleted silicon on insulator technology by Morin, Pierre, Maitrejean, Sylvain, Allibert, Frederic, Augendre, Emmanuel, Liu, Qing, Loubet, Nicolas, Grenouillet, Laurent, Pofelski, Alexandre, Chen, Kangguo, Khakifirooz, Ali, Wacquez, Romain, Reboh, Shay, Bonnevialle, Aurore, le Royer, Cyrille, Morand, Yves, Kanyandekwe, Joel, Chanemougamme, Daniel, Mignot, Yann, Escarabajal, Yann, Lherron, Benoit, Chafik, Fadoua, Pilorget, Sonia, Caubet, Pierre, Vinet, Maud, Clement, Laurent, Desalvo, Barbara, Doris, Bruce, Kleemeier, Walter

“…This paper reviews the different stressor techniques used in microelectronics, in the scope of the Ultra-Thin Body & Buried Oxide Fully-Depleted Silicon On…”
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Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices by Suarez-Segovia, Carlos, Leroux, Charles, Domengie, Florian, Dabertrand, Karen, Joseph, Vincent, Romano, Giovanni, Caubet, Pierre, Zoll, Stephane, Weber, Olivier, Ghibaudo, Gerard, Reimbold, Gilles, Haond, Michel

“…In this paper, the impact of metallic lanthanum (La) deposited by Radio-Frequency PVD on effective work function (WF eff ) of HfON-based NFET devices in a…”
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Matrix semigroups and differential equations: Ergodism and asymptotic behaviour of solutions with or without impulses, a survey by Caubet, Jean-Pierre

“…General structure of a matrix nonstationary semigroup dominated by a nonnegative matrix semigroup and with cardinality of state spaces uniformly bounded…”
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Characterization and impact of reduced copper plating overburden on 45 nm interconnect performances by Dubreuil, O., Caubet-Hilloutou, V., Guillan, J., Haxaire, K., Mellier, M., Caubet, P., Vannier, P., Petitprez, E., Bellet, D., Normandon, Ph

“…During first metal level interconnects fabrication, a controlled modification of the electro-deposited copper over-deposition (overburden) is performed using a…”
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Ainhum in a leper by MONTESTRUC, E, CAUBET, P

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Relativistic Brownian motion by Caubet, Jean-Pierre

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Relativistic Brownian motion by Caubet, Jean-Pierre

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