Search Results - "Byun, Myung Hwan"
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Stress-induced trench narrowing in Cu interconnect of sub-20 nm node: FEM simulation
Published in Materials science in semiconductor processing (01-12-2016)Get full text
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Material Characterization of Electroplated Nanocrystalline Nickel–Iron Alloys for Micro Electronic Mechanical System
Published in Japanese Journal of Applied Physics (01-09-2006)Get full text
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Effect of Co-Deposited Iron on Microstructures and Properties of Electroplated Nanocrystalline Nickel-Iron Alloys
Published in 稀土学报(英文版) (01-03-2006)“…O7; Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electroplating for MEMS devices. The iron content of the…”
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Stress-induced trench narrowing in Cu interconnect of sub-20nm node: FEM simulation
Published in Materials science in semiconductor processing (01-12-2016)“…The trench narrowing at sub-20nm BEOL process has been reproduced using a FEM simulation. The trench narrowing can be observed under the conditions of both the…”
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Rapid and Cyclable Morphology Transition of High‑χ Block Copolymers via Solvent Vapor-Immersion Annealing for Nanoscale Lithography
Published in ACS applied nano materials (22-03-2019)“…The self-assembly of block copolymers (BCPs) has attracted considerable attention because it can effectively generate highly ordered nanostructures through a…”
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