Search Results - "Buyuklimanli, Temel H."

Analytical Model for Redistribution Profile of Ion-Implanted Impurities During Solid-Phase Epitaxy by Suzuki, Kunihiro, Kataoka, Yuji, Nagayama, Susumu, Magee, Charles W., Buyuklimanli, Temel H., Nagayama, Tsutomu

“…We evaluated the redistribution profiles of ion-implanted impurities during solid-phase epitaxy using Rutherford backscattering spectrometry (RBS). RBS data…”
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Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)] by Magee, Charles W., Buyuklimanli, Temel H.

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Maximum Active Concentration of Ion-Implanted Phosphorus During Solid-Phase Epitaxial Recrystallization by Suzuki, Kunihiro, Tada, Yoko, Kataoka, Yuji, Kawamura, Kazuo, Nagayama, Tsutomu, Nagayama, Susumu, Magee, Charles W., Buyuklimanli, Temel H., Mueller, Dominik Christoph, Fichtner, Wolfgang, Zechner, Christoph

“…In this paper, we showed that the maximum active P concentration of approximately \hbox{2} \times \hbox{10}^{20}\ \hbox{cm}^{-3} exists during solid-phase…”
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Estimating lateral straggling of boron profiles ion implanted into crystalline silicon with a tilt angle of 0° using off-angle substrates by SUZUKI, Kunihiro, TANAHASHI, Katsuto, NAGAYAMA, Susumu, MAGEE, Charles W, BÜYÜKLIMANLI, Temel H, IWAMOTO, Eiji

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High-resolution depth profiling of ultrashallow boron implants in silicon using high-resolution RBS by Kimura, Kenji, Oota, Yukitoshi, Nakajima, Kaoru, Büyüklimanli, Temel H.

“…Depth profiles of ultralow energy (0.2–0.5 keV) B ion implants in Si(0 0 1) samples are measured by high-resolution Rutherford backscattering spectroscopy. The…”
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Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling by Büyüklimanli, Temel H., Marino, John W., Novak, Steven W.

“…Accurate depth profile analyses of distributions created by ultra low energy (ULE) ion implantation and annealing in Si has been difficult because the…”
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Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling by BÜYÜKLIMANLI, Temel H, MARINO, John W, NOVAK, Steven W

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Surface degradation of YBa 2 Cu 3 O 7 − δ superconductors on exposure to air and humidity by Büyüklimanli, Temel H., Simmons, Joseph H.

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