Mass Spectrometry Characterization of Methylphenylsilane-Hydrogen RF Plasmas

The plasmochemistry of methylphenylsilane diluted with hydrogen in radio frequency discharges during the deposition of thin films of plasmatic polysilane is investigated. The plasma reaction system has been examined under conditions identified from previous studies to give the best material. Mass sp...

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Bibliographic Details
Published in:	Plasma processes and polymers Vol. 4; no. 1; pp. 53 - 61
Main Authors:	Kuritka, Ivo, Broza, Pavel, Prycek, Jiri, Schauer, Frantisek
Format:	Journal Article
Language:	English
Published:	Weinheim WILEY-VCH Verlag 05-01-2007 WILEY‐VCH Verlag Wiley-VCH
Subjects:	Applied sciences cryogenic sampling Electric discharges Exact sciences and technology gas chromatography mass spectrometry organo-silicon precursors Physicochemistry of polymers Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Polymerization Polymers and radiations radio frequency glow discharge Investigation method Hydrogen Reaction mechanism Organic silane Polysilane Experimental study Mass spectrometry Plasma deposition Glow discharge polymerization Plasma chemistry Thin film
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Summary:	The plasmochemistry of methylphenylsilane diluted with hydrogen in radio frequency discharges during the deposition of thin films of plasmatic polysilane is investigated. The plasma reaction system has been examined under conditions identified from previous studies to give the best material. Mass spectrometry is used to follow the monomer fragmentation and to directly (on‐line) analyze the plasma composition under the static and dynamic regimes. The effect of input power is described. The products of the plasma‐induced reactions are collected in a cryogenic trap and then separated and analyzed by gas chromatography with a mass spectrometry analyzer. Organosilicon precursors for the plasma polymerization of one‐dimensional polysilanes are identified together with prevailing reaction pathways in the plasma. A simple method of monomer conversion efficiency is introduced.
Bibliography:	Grant Agency of the Czech Academy of Sciences - No. A100100622 Ministry of Education, Youth and Sports of the Czech Republic - No. MSM 7088352101 ArticleID:PPAP200600063 Czech-China cooperation - No. 1P05ME729; No. 1P05ME734 ark:/67375/WNG-1RVFTL2H-G istex:00B5A10272F636E2DD5F0A94FD36FAEF5C9E1FF1 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	1612-8850 1612-8869
DOI:	10.1002/ppap.200600063