RF Reflectometry of NEMS Motional Capacitance with Micromanipulator Probe

Adiabatic reversible computing can dramatically reduce heat generation by switching circuits slowly, relative to their RC time constants, and using reversible logic. Nano-electro-mechanical systems (NEMS) are a promising approach to implement reversible computing as they don't have leakage curr...

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Bibliographic Details
Published in:	2022 IEEE Silicon Nanoelectronics Workshop (SNW) pp. 1 - 2
Main Authors:	Celis-Cordova, Rene, Williams, Ethan M., Cayaspo, Gabriel J. Quintero, Gose, Jacob J., Brown, Abigail F., Chisum, Jonathan D., Orlov, Alexei O., Snider, Gregory L.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 11-06-2022
Online Access:	Get full text
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Summary:	Adiabatic reversible computing can dramatically reduce heat generation by switching circuits slowly, relative to their RC time constants, and using reversible logic. Nano-electro-mechanical systems (NEMS) are a promising approach to implement reversible computing as they don't have leakage current and can be used as pull-up and pull-down networks to generate digital gates. We present the measurement of NEMS motional capacitance devices with radio frequency (RF) reflectometry using a micromanipulator probe. The probe includes an on-board matching network that can be tuned to match the impedance of the NEMS devices under test. The NEMS are operated with a DC gate voltage and the reflectometry measurements verify their functionality paving the way for adiabatic reversible computing.
ISSN:	2161-4644
DOI:	10.1109/SNW56633.2022.9889036