Search Results - "Brongersma, S. H."

Influence of the electron mean free path on the resistivity of thin metal films by Zhang, W., Brongersma, S.H., Richard, O., Brijs, B., Palmans, R., Froyen, L., Maex, K.

“…In this paper, we discuss the influence of the electron mean free path on resistivity of thin metal films. The simulation results obtained by using…”
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Influence of surface and grain-boundary scattering on the resistivity of copper in reduced dimensions by Wu, W., Brongersma, S. H., Van Hove, M., Maex, K.

“…We examine the influence of surface and grain-boundary scattering on the total electrical resistivity of copper as dimensions are reduced close to the bulk…”
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Grain Growth, Stress, and Impurities in Electroplated Copper by Brongersma, S. H., Kerr, E., Vervoort, I., Saerens, A., Maex, K.

“…The widely observed secondary grain growth in electroplated Copper layers is shown to be incomplete after the sheet resistance and stress of the layer appear…”
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Challenges for structural stability of ultra-low- k-based interconnects by Iacopi, F, Brongersma, S.H, Vandevelde, B, O'Toole, M, Degryse, D, Travaly, Y, Maex, K

“…Severe mechanical loads during multilevel metallization manufacturing, such as repeated thermal cycles and chemical–mechanical planarization processes, can…”
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Self-annealing characterization of electroplated copper films by Lagrange, S, Brongersma, S.H, Judelewicz, M, Saerens, A, Vervoort, I, Richard, E, Palmans, R, Maex, K

“…Self-annealing of electro-chemically deposited copper films is described and studied, with a focus on the effect of process parameters like concentration of…”
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Grain growth in copper interconnect lines by Wu, W., Ernur, D., Brongersma, S.H., Van Hove, M., Maex, K.

“…State-of-the-art copper interconnects are fabricated using a damascene process in which trenches are filled with copper by electro-plating. Similar to…”
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Compressive stress relaxation through buckling of a low- k polymer-thin cap layer system by Iacopi, F., Brongersma, S. H., Maex, K.

“…The thermomechanical stability of a system composed of a metallic cap layer on top of a low-k thermosetting polymer film is investigated. It is observed that,…”
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Influence of mass density and mechanical properties on the surface acoustic wave velocity dispersion by Sekiguchi, A., Brongersma, S.H., Maex, K.

“…The surface acoustic wave technique is a non-contact, non-destructive opto-acoustic technique used to measure film thickness and material properties, such as…”
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High sensitive quasi freestanding epitaxial graphene gas sensor on 6H-SiC by Iezhokin, I., Offermans, P., Brongersma, S. H., Giesbers, A. J. M., Flipse, C. F. J.

“…We have measured the electrical response to NO2, N2, NH3, and CO for epitaxial graphene and quasi freestanding epitaxial graphene on 6H-SiC substrates. Quasi…”
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Magnetic anisotropy of a Bi2Sr2CaCu2Ox single crystal by MARTINEZ, J. C, BRONGERSMA, S. H, KOSHELEV, A, IVLEV, B, KES, P. H, GRIESSEN, R. P, DE GROOT, D. G, TARNAVSKI, Z, MENOVSKY, A. A

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A quantitative adhesion study between contacting materials in Cu damascene structures by Lanckmans, F, Brongersma, S.H, Varga, I, Poortmans, S, Bender, H, Conard, T, Maex, K

“…A quantitative determination of the adhesion strength between contacting materials, relevant for Cu/low- k damascene technology, is presented. Shear testing is…”
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Series of maxima in the field dependent magnetic moment of layered superconductors by BRONGERSMA, S. H, VERWEIJ, E, KOEMAN, N. J, DE GROOT, D. G, GRIESSEN, R, IVLEV, B. I

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Volatile detection system using piezoelectric micromechanical resonators interfaced by an oscillator readout by Pettine, J., Patrascu, M., Karabacak, D.M., Vandecasteele, M., Petrescu, V., Brongersma, S.H., Crego-Calama, M., Van Hoof, C.

“…► A real-time volatile detection system combining a MEMS piezoelectric resonator and an off-the-shelf electronic readout is presented. ► We demonstrate a…”
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Self-excitation of piezoelectric microbridge resonators by external feedback by van Leeuwen, R., Karabacak, D.M., Brongersma, S.H., Crego-Calama, M., van der Zant, H.S.J., Venstra, W.J.

“…[Display omitted] ► External feedback is applied to a tuneable microbridge resonator with an embedded AlN piezo actuator. ► The Q-factor of the feedback system…”
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Room-temperature CO₂ sensing using metal–insulator–semiconductor capacitors comprising atomic-layer-deposited La₂O₃ thin films by Jinesh, K.B, Dam, V.A.T, Swerts, J, de Nooijer, C, van Elshocht, S, Brongersma, S.H, Crego-Calama, M

“…Room temperature detection of CO₂ using metal–insulator–silicon (MIS) devices is reported. These devices comprise atomic layer deposited La₂O₃ thin films as…”
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Increasing the mean grain size in copper films and features by Vanstreels, K., Brongersma, S.H., Tokei, Zs, Carbonell, L., De Ceuninck, W., D’Haen, J., D’Olieslaeger, M.

“…A new grain-growth mode is observed in thick sputtered copper films. This new grain-growth mode, also referred to in this work as super secondary grain growth…”
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Laser ablation deposition of TiN films by Kools, J. C. S., Nillesen, C. J. C. M, Brongersma, S. H., van de Riet, E., Dieleman, J.

“…Excimer laser ablation of TiN ceramic in vacuum and of Ti metal in N2 gas environment is used to deposit thin TiN films on Si substrates. The dependence of…”
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Concentrations and velocity distributions of positive ions in laser ablation of copper by Kools, J. C. S., Brongersma, S. H., van de Riet, E., Dieleman, J.

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Interactions between directly- and parametrically-driven vibration modes in a micromechanical resonator by Westra, H. J. R., Karabacak, D. M., Brongersma, S. H., Crego-Calama, M., van der Zant, H. S. J., Venstra, W. J.

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Characterization of porous structure in ultra-low- κ dielectrics by depositing thin conductive cap layers by Iacopi, F, Tökei, Zs, Stucchi, M, Brongersma, S.H, Vanhaeren, D, Maex, K

“…A new methodology to characterize the porous structure of mesoporous dielectrics is presented. The technique is based on the evaluation of the degree of…”
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