Search Results - "Brennen, R.A."

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    Multiple mode micromechanical resonators by Brennen, R.A., Pisano, A.P., Tang, W.C.

    “…Two resonant micromechanical structures that have been designed, fabricated, and tested and which exhibited multiple modes of vibration are described. The…”
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    Conference Proceeding
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    Large displacement linear actuator by Brennen, R.A., Lim, M.G., Pisano, A.P., Chou, A.T.

    “…The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits the best features of previous electrostatic actuator designs…”
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    Conference Proceeding
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    Deep etch x‐ray lithography at the advanced light source: First results by Malek, Chantal Khan, Jackson, Keith, Brennen, Reid A., Hecht, Michael H., Bonivert, William D., Hruby, Jill

    “…Deep etch x‐ray lithography permits the manufacture of very accurate high‐aspect‐ratio microstructures, which can be used as master templates for subsequent…”
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    Conference Proceeding Journal Article