Search Results - "Brennen, R.A."
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1
Joint American-Russian experiment, Trek
Published in Advances in space research (01-01-1995)Get full text
Journal Article -
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Multiple mode micromechanical resonators
Published in IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (1990)“…Two resonant micromechanical structures that have been designed, fabricated, and tested and which exhibited multiple modes of vibration are described. The…”
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Conference Proceeding -
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Large displacement linear actuator
Published in IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop (1990)“…The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits the best features of previous electrostatic actuator designs…”
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Conference Proceeding -
4
Deep etch x‐ray lithography at the advanced light source: First results
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1994)“…Deep etch x‐ray lithography permits the manufacture of very accurate high‐aspect‐ratio microstructures, which can be used as master templates for subsequent…”
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Conference Proceeding Journal Article