Search Results - "Bolze, Detlef"

Atomic layer processing for doping of SiGe by Tillack, Bernd, Yamamoto, Yuji, Bolze, Detlef, Heinemann, Bernd, Rücker, Holger, Knoll, Dieter, Murota, Junichi, Mehr, Wolfgang

“…Atomic layer processing has been demonstrated for doping of SiGe during Reduced Pressure Chemical Vapour Deposition (RPCVD) in a commercial single wafer…”
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Carrier density profiling of ultra-shallow junction layer through corrected C-V plotting by Chen, J., Dimitrov, D., Dimitrova, T., Timans, P., Gelpey, J., McCoy, S., Lerch, W., Paul, S., Bolze, D.

“…The aim of this report is to present and justify a new approach for carrier density profiling in ultra-shallow junction (USJ) layer. This new approach is based…”
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