Search Results - "Bogoslovtseva, A. L."

SILICON SURFACE PATTERNING BY GLOW DISCHARGE PLASMA by Petrova, A. V., Bogoslovtseva, A. L., Starinskiy, S. V., Safonov, A. I.

“…The possibility of changing the silicon surface morphology at certain glow discharge parameters is shown. It is established that oxidation is the main process…”
Get full text

EFFECT OF ANNEALING ON THE STRUCTURE AND PROPERTIES OF THIN FLUOROPOLYMER COATINGS PREPARED BY HW CVD by Safonov, A. I., Bogoslovtseva, A. L., Sulyaeva, V. S., Kiseleva, M. S., Zhidkov, I. S., Starinskiy, S. V.

“…The effect of thermal annealing on the structure and properties of fluoropolymer coatings obtained by hot wire chemical vapor deposition is investigated. The…”
Get full text

Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition by Safonov, A. I., Sulyaeva, V. S., Bogoslovtseva, A. L., Timoshenko, N. I.

“…The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the…”
Get full text