Search Results - "Bogdanowicz, J."

Nanofocusing of light into semiconducting fin photonic crystals by Bogdanowicz, J., Nuytten, T., Gawlik, A., Schulze, A., De Wolf, I., Vandervorst, W.

“…This letter demonstrates experimentally and investigates theoretically the possibility for enhanced light coupling into periodic arrays of nanoscale…”
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Atom probe tomography analysis of SiGe fins embedded in SiO2: Facts and artefacts by Melkonyan, D., Fleischmann, C., Arnoldi, L., Demeulemeester, J., Kumar, A., Bogdanowicz, J., Vurpillot, F., Vandervorst, W.

“…•Compressed lateral dimension and oxygen penetration into the fin body are apparent.•Causes are converging and overlapping ion trajectories due to a unique tip…”
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Laser-assisted atom probe tomography of semiconductors: The impact of the focused-ion beam specimen preparation by Bogdanowicz, J., Kumar, A., Fleischmann, C., Gilbert, M., Houard, J., Vella, A., Vandervorst, W.

“…•Focused ion beam preparation damages and modifies the properties of atom probe tips.•Supra-bandgap absorption is enhanced.•Sub-bandgap absorption is turned…”
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On the understanding of local optical resonance in elongated dielectric particles by Bogdanowicz, J., Vandervorst, W.

“…This paper discusses the peculiar light coupling and absorption properties of a dielectric particle with a varying nanoscale radius and a high aspect ratio. To…”
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Wafer-scale characterization for two-dimensional material layers by Moussa, A., Bogdanowicz, J., Groven, B., Morin, P., Beggiato, M., Saib, M., Santoro, G., Abramovitz, Y., Houchens, K., Ben Nissim, S., Meir, N., Hung, J., Urbanowicz, A., Koret, R., Turovets, I., Lee, B., Lee, W.T., Lorusso, G. F., Charley, A.-L.

“…Abstract Logic devices based on two-dimensional (2D) channel materials require highly crystalline monolayers. Despite various laboratory-scale metrology…”
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Impact of the apex of an elongated dielectric tip upon its light absorption properties by Bogdanowicz, J., Gilbert, M., Koelling, S., Vandervorst, W.

“…•Periodic holes/spots with both low and high spatial frequencies are observed on nanoscale conical silicon tips illuminated with high-fluence laser pulses.•The…”
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Wet-chemical etching of atom probe tips for artefact free analyses of nanoscaled semiconductor structures by Melkonyan, D., Fleischmann, C., Veloso, A., Franquet, A., Bogdanowicz, J., Morris, R.J.H., Vandervorst, W.

“…•Etching of SiO2 from an APT tip was implemented as a final tip preparation step.•Tip-shape induced artefacts are eliminated as shown on an SiGe fin embedded…”
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Light absorption in conical silicon particles by Bogdanowicz, J, Gilbert, M, Innocenti, N, Koelling, S, Vanderheyden, B, Vandervorst, W

“…The problem of the absorption of light by a nanoscale dielectric cone is discussed. A simplified solution based on the analytical Mie theory of scattering and…”
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Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts by Melkonyan, D, Fleischmann, C, Arnoldi, L, Demeulemeester, J, Kumar, A, Bogdanowicz, J, Vurpillot, F, Vandervorst, W

“…We present atom probe analysis of 40nm wide SiGe fins embedded in SiO and discuss the root cause of artefacts observed in the reconstructed data. Additionally,…”
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Imaging of Overlay and Alignment Markers Under Opaque Layers Using Picosecond Laser Acoustic Measurements : AM: Advanced Metrology by Mehendale, M., Antonelli, A., Mair, R., Mukundhan, P., Bogdanowicz, J., Charley, A.L., Leray, P., Yasin, F., Crotti, D.

“…Optically opaque materials present a series of challenges for alignment and overlay in the semi-damascene process flow or after the processing of the magnetic…”
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Optimal laser positioning for laser-assisted atom probe tomography by Koelling, S., Innocenti, N., Bogdanowicz, J., Vandervorst, W.

“…Laser-assisted atom probe tomography is a material analysis method based on field evaporating ions from a tip-shaped sample by a combination of a standing…”
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Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy by Nuytten, T., Bogdanowicz, J., Witters, L., Eneman, G., Hantschel, T., Schulze, A., Favia, P., Bender, H., De Wolf, I., Vandervorst, W.

“…The continued importance of strain engineering in semiconductor technology demands fast and reliable stress metrology that is non-destructive and process…”
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Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics by Mehendale, M., Kotelyanskii, M., Mair, R., Mukundhan, P., Bogdanowicz, J., Teugels, L., Charley, A.L., Kuszewski, P.

“…Characterization of patterned nanostructures in modern nanoelectronic memory and logic devices using traditional optical critical dimension (OCD) metrology…”
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On the analysis of the activation mechanisms of sub-melt laser anneals by Clarysse, T., Bogdanowicz, J., Goossens, J., Moussa, A., Rosseel, E., Vandervorst, W., Petersen, D.H., Lin, R., Nielsen, P.F., Hansen, Ole, Merklin, G., Bennett, N.S., Cowern, N.E.B.

“…In order to fabricate carrier profiles with a junction depth (∼15 nm) and sheet resistance value suited for sub-32 nm Si-CMOS technology, the usage of sub-melt…”
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Subtelomeric rearrangements in Polish subjects with intellectual disability and dysmorphic features by Bogdanowicz, J., Pawłowska, B., Ilnicka, A., Gawlik-Zawiślak, S., Jóźwiak, A., Sobiczewska, B., Zdzienicka, E., Korniszewski, L., Zaremba, J.

“…Fluorescent in situ hybridization (FISH) was performed in 76 patients referred to our department because of intellectual disability and dysmorphic features…”
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Inspection and metrology challenges for 3 nm node devices and beyond by Shohjoh, T., Ikota, M., Isawa, M., Lorusso, G. F., Horiguchi, N., Briggs, B., Mertens, H., Bogdanowicz, J., De Bisschop, P., Charley, A.-L.

“…We report on non-destructive inspection and metrology potential of high-voltage (HV) critical dimension scanning electron microscopy (CD-SEM) for 3 nm node…”
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Identification, characterization and purification of the lantibiotic staphylococcin T, a natural gallidermin variant by Furmanek, B., Kaczorowski, T., Bugalski, R., Bielawski, K., Bogdanowicz, J., Podhajska, AnD. A. J.

“…B. FURMANEK, T. KACZOROWSKI, R. BUGALSKI, K. BIELAWSKI, J. BOGDANOWICZ and A.J. PODHAJSKA.1999.Staphylococcin T (StT), an antibacterial agent produced by a…”
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Dopant, composition and carrier profiling for 3D structures by Vandervorst, W., Fleischmann, C., Bogdanowicz, J., Franquet, A., Celano, U., Paredis, K., Budrevich, A.

“…With the transition from planar to three-dimensional device architectures, devices such as FinFETs, TFETs and nanowires etc. become omnipresent. This requires…”
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Surgical Treatment of Renal Cell Carcinoma in a Horseshoe-shaped Kidney Concomitant with an Aortic Aneurysm by Jansen, W.B.J., Bogdanowicz, J.F.A.T., Welling, L.

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Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives by Barnes, J.P., Grenier, A., Mouton, I., Barraud, S., Audoit, G., Bogdanowicz, J., Fleischmann, C., Melkonyan, D., Vandervorst, W., Duguay, S., Rolland, N., Vurpillot, F., Blavette, D.

“…Atom probe tomography is unique in its ability to image in 3D at the atomic scale and measure composition in a semiconductor device with high sensitivity…”
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