Search Results - "Blackwell, D.B."
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Large area plasma processing system based on electron beam ionization
Published in ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) (2000)“…Summary form only given. Electron beam ionization is both efficient at producing plasma and scalable to large area (square meters) with beam energy and…”
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Conference Proceeding
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2
Plasma processing and surface treatments in LAPPS
Published in ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) (2000)“…Summary form only given. Photoresist ashing tests have demonstrated anisotropic pattern transfer in our modulated 'Large Area Plasma Processing System' with…”
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Conference Proceeding