Search Results - "Besaucele, H."
-
1
High energy and average power solid-state UV laser for industrial applications
Published in EPJ Web of Conferences (2024)“…High energy and average power solid-state UV laser involves several challenges to manage degradation due to UV radiations. Recent results achieved in this…”
Get full text
Journal Article Conference Proceeding -
2
Defect kinetics and dopant activation in submicrosecond laser thermal processes
Published in Applied physics letters (07-12-2009)“…Defect evolution in ion implanted c-Si at the submicrosecond time scales during a laser thermal annealing process is investigated by means of kinetic…”
Get full text
Journal Article -
3
Laser Thermal Annealing: A low thermal budget solution for advanced structures and new materials
Published in 2014 International Workshop on Junction Technology (IWJT) (01-05-2014)“…With the growing demand for improved performance, increased storage capacity and more functionality, the industry is facing challenges which require disruptive…”
Get full text
Conference Proceeding -
4
100Hz Joule Class Ultra-Short Pulses TiSa Laser
Published in 2024 Conference on Lasers and Electro-Optics (CLEO) (05-05-2024)“…Joule class lasers at 100Hz with ultra-short pulse involve a lot of challenges to manage thermal issues in the amplifiers as well as in the compressors. Recent…”
Get full text
Conference Proceeding -
5
Defect kinetics and dopant activation in submicrosecond laserthermal processes
Published in Applied physics letters (07-12-2009)“…Defect evolution in ion implanted c-Si at the submicrosecond time scales during a laser thermal annealing process is investigated by means of kinetic…”
Get full text
Journal Article -
6
Damage evolution in implanted silicon by pulsed excimer laser annealing
Published in 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (01-09-2009)“…The evolution of the implantation damage during a Pulsed Laser thermal annealing process is investigated by means of an accurate modeling which could…”
Get full text
Conference Proceeding -
7
Experimental and theoretical analysis of dopant activation in double implanted silicon by pulsed laser thermal annealing
Published in 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (01-09-2009)“…A collection of slides from the author's conference presentation shows dopant activation by pulsed laser thermal annealing. It also discusses single pulse deep…”
Get full text
Conference Proceeding -
8
Activation of ion implanted Si for backside processing by ultra-fast laser thermal annealing: Energy homogeneity and micro-scale sheet resistance
Published in 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (01-09-2009)“…In this paper ion activation of implanted silicon using ultra-fast laser thermal annealing (LTA) process was discussed. The results stated that there was high…”
Get full text
Conference Proceeding