Search Results - "Berthelot, Audrey"

Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope by Janioud, Pierre, Koumela, Alexandra, Poulain, Christophe, Rey, Patrice P., Berthelot, Audrey, P., Morfouli, Jourdan, Guillaume Emmanuel

“…This paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the…”
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Mitigation of mechanical cross-talk in resonant beam accelerometers by Miani, Theo, Verdot, Thierry, Berthelot, Audrey, Maspero, Federico, Koumela, Alexandra, Robert, Philippe, Langfelder, Giacomo, Arcamone, Julien, Sansa, Marc

“…Resonant MEMS beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a…”
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1.3 mm2 Nav-Grade NEMS-Based Gyroscope by Gadola, Marco, Buffoli, Andrea, Sansa, Marc, Berthelot, Audrey, Robert, Philippe, Langfelder, Giacomo

“…The research reports the design and experimental results of novel gyroscopes based on nano-resistive sensing, capable to meet navigation grade specifications…”
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1.3 mm 2 Nav-Grade NEMS-Based Gyroscope by Gadola, Marco, Buffoli, Andrea, Sansa, Marc, Berthelot, Audrey, Robert, Philippe, Langfelder, Giacomo

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Evolution of materials technology for stacked-capacitors in 65nm embedded-DRAM by Gerritsen, Eric, Emonet, Nicolas, Caillat, Christian, Jourdan, Nicolas, Piazza, Marc, Fraboulet, David, Boeck, Bruce, Berthelot, Audrey, Smith, Steven, Mazoyer, Pascale

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Quarter-mm 2 High Dynamic Range Silicon Capacitive Accelerometer With a 3D Process by Maspero, Federico, Delachanal, Sylvain, Berthelot, Audrey, Joet, Loic, Langfelder, Giacomo, Hentz, Sebastien

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Quarter-mm2 High Dynamic Range Silicon Capacitive Accelerometer With a 3D Process by Maspero, Federico, Delachanal, Sylvain, Berthelot, Audrey, Joet, Loic, Langfelder, Giacomo, Hentz, Sebastien

“…A new 3D process is proposed for inertial MEMS sensors where a thin transduction layer based on high-density surface-varying comb fingers, with nano-metric…”
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Analysis of Mode-Split Operation in MEMS Based on Piezoresistive Nanogauges by Langfelder, Giacomo, Dellea, Stefano, Berthelot, Audrey, Rey, Patrice, Tocchio, Alessandro, Longoni, Antonio Francesco

“…Microelectromechanical system (MEMS) sensors based on nanoscale piezoresistive sensing elements (nanogauges) can have mechanical modes either related only to…”
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1/f Noise Characterization of Piezoresistive Nano-Gauges for MEMS Sensors by Nowodzinski, Antoine, Ahmed, Dihia Sidi, Theodorou, Christoforos, Kournela, Alexandra, Duchemin, Helene, Dressler, Cyril, Berthelot, Audrey, Lhermer, Helene

“…This paper describes the study carried out in order to characterize the influence of the main fabrication steps of the silicon nano-gauge on their l/f noise…”
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Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM by Gerritsen, Eric, Emonet, Nicolas, Caillat, Christian, Jourdan, Nicolas, Piazza, Marc, Fraboulet, David, Boeck, Bruce, Berthelot, Audrey, Smith, Steven, Mazoyer, Pascale

“…The architecture, materials choice and process technology for stacked-capacitors in embedded-DRAM applications are a crucial concern for each new technology…”
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Nanoresonator-based accelerometer with large bandwidth and improved bias stability by Miani, Theo, Verdot, Thierry, Berthelot, Audrey, Maspero, Federico, Koumela, Alexandra, Robert, Philippe, Langfelder, Giacomo, Arcamone, Julien, Sansa, Marc

“…Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the…”
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Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction by Miani, Theo, Verdot, Thierry, Berthelot, Audrey, Maspero, Federico, Koumela, Alexandra, Robert, Philippe, Langfelder, Giacomo, Arcamone, Julien, Sansa, Marc

“…We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass,…”
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First MEMS Microphone Based on Capacitive Transduction in Vacuum by Dagher, Samer, Souchon, Frederic, Berthelot, Audrey, Durand, Stephane, Joet, Loic

“…This paper presents the first experimental results of a new MEMS microphone with in-vacuum capacitive transduction. The device is divided into a…”
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First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges by Lhermet, Helene, Verdot, Thierry, Berthelot, Audrey, Desloges, Brigitte, Souchon, Frederic

“…For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the…”
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P-type silicon nanogauge based self-sustained oscillator by Lehée, Guillaume, Anciant, Romain, Souchon, Frédéric, Berthelot, Audrey, Rey, Patrice, Jourdan, Guillaume

“…This paper reports self-sustained motion of a low frequency MEMS resonator that leans on tiny p-type silicon piezoresistive nanowires, as a result of Thermal…”
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Micro-Photoacoustic Cell with Integrated Microphone for Sub-Ppm Gas Sensing by Lhermet, Helene, Verdot, Thierry, Teulle, Alexandre, Berthelot, Audrey, Gliere, Alain, Desloges, Brigitte, Souchon, Frederic, Fournier, Maryse, Fedeli, Jean-Marc, Coutard, Jean-Guillaume

“…This paper demonstrates, for the first time, an on-chip integration of a photoacoustic (PA) detector, one of the main building blocks required for chemical…”
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Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors by Dellea, Stefano, Giacci, Federico, Longoni, Antonio, Rey, Patrice, Berthelot, Audrey, Langfelder, Giacomo

“…This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the…”
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Ultra-compact and highly sensitive pressure sensor based on nano-gauge detection and cointegrated with inertial sensors by Rey, Patrice, Berthelot, Audrey, Jourdan, Guillaume, Duchemin, Helene, Anciant, Romain, Blanc, Henri, Robert, Philippe

“…This paper reports for the first time the experimental pressure response of an ultra-compact and highly linear absolute pressure sensor based on suspended…”
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Investigation of the fatigue origin and propagation in submicrometric silicon piezoresistive layers by Langfelder, Giacomo, Dellea, Stefano, Rey, Patrice, Berthelot, Audrey, Longoni, Antonio

“…The work investigates fatigue damage accumulation in a 250-nm thick Silicon layer that can be integrated in surface micromachining processes to realize…”
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MEMS reliability study in shock environments through numerical and experimental investigations by Lehée, Guillaume, Calvar-Mimica, Ariane, Chantrait, Teddy, Charles, Alexandre, Jeanroy, Alain, Onfroy, Philippe, Colin, Mikaël, Berthelot, Audrey

“…This paper reports a novel method to evaluate and improve the reliability of mechanical stops during design and validation phases of MEMS (Micro…”
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