Search Results - "Benkenstein, Tino"
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High performance diffraction gratings made by e-beam lithography
Published in Applied physics. A, Materials science & processing (01-12-2012)“…Gratings are essential components in different high performance optical set-ups such as spectrometers in space missions or ultrashort-pulse laser compression…”
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Journal Article Conference Proceeding -
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Wide band UV/Vis/NIR blazed-binary reflective gratings for spectro-imagers: two lithographic technologies investigation
Published in Journal of the European Optical Society. Rapid publications (2023)“…We report on subwavelength reflective gratings for hyperspectral applications operating in a very large spectral band (340–1040 nm). Our study concerns a…”
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Journal Article -
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Wide band UV/Vis/NIR blazed-binary reflective gratings: two lithographic techniques investigation
Published in EPJ Web of conferences (2021)“…We report on subwavelength reflective gratings for hyperspectral applications operating in the 340 nm-1040 nm spectral range. The blazed grating period is 30…”
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Journal Article Conference Proceeding -
4
Direct bonding for the encapsulation of transverse optical gratings
Published in Microelectronic engineering (01-10-2013)“…[Display omitted] ► Successful direct bonding of SiO2 binary gratings in transverse orientation. ► Gap opening method reveals different bond strengths at…”
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Journal Article -
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Direct bonding for the encapsulation of transverse optical gratings : Nanofabrication 2012
Published in Microelectronic engineering (2013)Get full text
Conference Proceeding