Search Results - "Benkenstein, Tino"

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    High performance diffraction gratings made by e-beam lithography by Zeitner, Uwe D., Oliva, Maria, Fuchs, Frank, Michaelis, Dirk, Benkenstein, Tino, Harzendorf, Torsten, Kley, Ernst-Bernhard

    “…Gratings are essential components in different high performance optical set-ups such as spectrometers in space missions or ultrashort-pulse laser compression…”
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    Journal Article Conference Proceeding
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    Wide band UV/Vis/NIR blazed-binary reflective gratings: two lithographic techniques investigation by Lee, Mane-Si Laure, Cholet, Julie, Delboulbé, Anne, Guillemet, Raphaël, Loiseaux, Brigitte, Garabedian, Patrick, Flügel-Paul, Thomas, Benkenstein, Tino, Sadlowski, Susann, Tetaz, Nicolas, Windpassinger, Roman, Mahalik, Saroj

    Published in EPJ Web of conferences (2021)
    “…We report on subwavelength reflective gratings for hyperspectral applications operating in the 340 nm-1040 nm spectral range. The blazed grating period is 30…”
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    Journal Article Conference Proceeding
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    Direct bonding for the encapsulation of transverse optical gratings by Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, Uwe

    Published in Microelectronic engineering (01-10-2013)
    “…[Display omitted] ► Successful direct bonding of SiO2 binary gratings in transverse orientation. ► Gap opening method reveals different bond strengths at…”
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    Journal Article
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