Search Results - "Ben Giesbers, J."

Nanoscale etching of resists in view of a mechanistic framework by van Delft, Falco C.M.J.M., Ben Giesbers, J., Nienhuis, Gert-Jan

“…In our previously developed mechanistic framework for dry etching, the three consecutive reaction steps (reactant chemisorption, surface reaction and product…”
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Classification of impact-assisted etch mechanisms by van Delft, Falco C.M.J.M., Giesbers, J.Ben

“…Previously, a mechanistic framework has been constructed for impact-assisted etch reactions in e.g. Reactive Ion Etching. The consecutive reaction steps…”
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