Search Results - "Belsito, Luca"

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    Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators by Belsito, Luca, Ferri, Matteo, Mancarella, Fulvio, Masini, Luca, Yan, Jize, Seshia, Ashwin A., Soga, Kenichi, Roncaglia, Alberto

    Published in Sensors and actuators. A. Physical. (01-03-2016)
    “…•Wafer level vacuum packaged flexural resonators are fabricated.•The MEMS are employed as strain sensor fort structural material by exploiting their mechanical…”
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    Journal Article
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    Phonon scattering enhancement in silicon nanolayers by Narducci, Dario, Cerofolini, Gianfranco, Ferri, Matteo, Suriano, Francesco, Mancarella, Fulvio, Belsito, Luca, Solmi, Sandro, Roncaglia, Alberto

    Published in Journal of materials science (01-04-2013)
    “…Dimensional confinement in silicon nanowires (NWs) is well-known for enhancing phonon scattering, thus leading to a pronounced reduction of thermal…”
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    Journal Article
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    Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators by Belsito, Luca, Bosi, Matteo, Mancarella, Fulvio, Ferri, Matteo, Roncaglia, Alberto

    Published in Journal of microelectromechanical systems (01-02-2020)
    “…The paper reports on the fabrication and characterization of flexural resonators designed for resonant strain sensing and manufactured using 2 μm thick…”
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    Journal Article
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    Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer by Ganji, Bahram Azizollah, Sedaghat, Sedighe Babaei, Roncaglia, Alberto, Belsito, Luca

    Published in Solid-state electronics (01-10-2018)
    “…•A MEMS capacitive microphone with perforated diaphragm supported by Z-shape arms.•The Z-shape arms cause to decrease diaphragm stiffness and air damping.•The…”
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    Journal Article
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    Design and fabrication of high performance condenser microphone using C-slotted diaphragm by Azizollah Ganji, Bahram, Babaei Sedaghat, Sedighe, Roncaglia, Alberto, Belsito, Luca

    “…In this paper, we present a new design of MEMS condenser microphone using SOI wafer. To improve the performance of the microphone, a perforated diaphragm with…”
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    Journal Article
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    Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on and Silicon by Sapienza, Sergio, Ferri, Matteo, Belsito, Luca, Marini, Diego, Zielinski, Marcin, La Via, Francesco, Roncaglia, Alberto

    Published in Micromachines (Basel) (03-09-2021)
    “…3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical properties (high Young’s modulus and low density) that allow the device to…”
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    Journal Article
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    Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on 111> and 100> Silicon by Sergio Sapienza, Matteo Ferri, Luca Belsito, Diego Marini, Marcin Zielinski, Francesco La Via, Alberto Roncaglia

    Published in Micromachines (Basel) (01-09-2021)
    “…3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical properties (high Young’s modulus and low density) that allow the device to…”
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    Journal Article
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    Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete by Marini, Diego, Belsito, Luca, Mancarella, Fulvio, Bonafe, Filippo, Roncaglia, Alberto

    Published in 2017 IEEE SENSORS (01-10-2017)
    “…The fabrication and laboratory testing of Micro-Opto-Mechanical sensors for the measurements of width of surface opening cracks in concrete structures are…”
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    Conference Proceeding
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    Ultra-Low Power CMOS Readout for Resonant MEMS Strain Sensors by Marco Crescentini, Cinzia Tamburini, Luca Belsito, Aldo Romani, Alberto Roncaglia, Marco Tartagni

    Published in Proceedings (01-12-2018)
    “…This paper presents an ultra-low power, silicon-integrated readout for resonant MEMS strain sensors. The analogue readout implements a negative-resistance…”
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    Journal Article
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    Sensitivity Enhancement in Vacuum Packaged Resonant MEMS Strain Sensors with On-Chip Strain Amplification Mechanism by Belsito, Luca, Masini, Luca, Roncaglia, Alberto

    “…A new strain sensor design based on vacuum packaged Double-Ended Tuning Fork silicon resonators with a strain amplification mechanism is presented. The sensors…”
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    Conference Proceeding
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    Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors by Belsito, Luca, Ferri, Matteo, Masini, Luca, Roncaglia, Alberto

    “…The application of high-resolution MEMS strain sensors based on micromechanical resonators fabricated with wafer-level vacuum packaging to the construction of…”
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    Conference Proceeding
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    Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips by Belsito, Luca, Ferri, Matteo, Roncaglia, Alberto

    “…Silicon resonators fabricated with wafer-level vacuum packaging on ultrathin silicon chips (overall thickness around 60 μm) are utilized for strain…”
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    Conference Proceeding
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    Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range by Cozzani, E., Summonte, C., Belsito, L., Cardinali, G.C., Roncaglia, A.

    Published in 2007 IEEE Sensors (01-10-2007)
    “…We present a design study aimed at fabricating micromachined thermal emitters for infrared gas sensing with high emission efficiency in the 9-12 μm wavelength…”
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    Conference Proceeding