Search Results - "Belharet, Djaffar"

Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon by Clementi, Giacomo, Ouhabaz, Merieme, Margueron, Samuel, Suarez, Miguel Angel, Bassignot, Florent, Gauthier-Manuel, Ludovic, Belharet, Djaffar, Dulmet, Bernard, Bartasyte, Ausrine

“…LiNbO3 has been little studied for the piezoelectric energy harvesting applications. Although it is a cheap piezoelectric material without lead and toxic…”
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Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror by Baron, Thomas, Oliveri, Stefania, Richard, Thomas, Soumann, Valerie, Belharet, Djaffar, Robert, Laurent, Raschetti, Marina, Salut, Roland, Courjon, Emilie, Laroche, Thierry, Bernard, Florent, Clairet, Alexandre, Ballandras, Sylvain

“…This Research article document discussed about a new structure composed of a sub‐micron‐thick layer of a single‐crystal piezoelectric material on a substrate…”
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Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester by Barrientos, Gabriel, Clementi, Giacomo, Trigona, Carlo, Ouhabaz, Merieme, Gauthier-Manuel, Ludovic, Belharet, Djaffar, Margueron, Samuel, Bartasyte, Ausrine, Malandrino, Graziella, Baglio, Salvatore

“…In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication…”
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Development and characterization of thinned PZT bulk technology based actuators devoted to a 6-DOF micropositioning platform by Benouhiba, Amine, Belharet, Djaffar, Bienaimé, Alex, Chalvet, Vincent, Rakotondrabe, Micky, Clévy, Cédric

“…Piezoelectric actuators are widespread in the design of micro/nanorobotic tools and microsystems, as they have a very interesting electromechanical coupling…”
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Lead-Free LiNbO[sub.3] Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester by Barrientos, Gabriel, Clementi, Giacomo, Trigona, Carlo, Ouhabaz, Merieme, Gauthier-Manuel, Ludovic, Belharet, Djaffar, Margueron, Samuel, Bartasyte, Ausrine, Malandrino, Graziella, Baglio, Salvatore

“…In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO[sub.3]. The…”
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Plasma impedance monitoring for real time endpoint detection of bulk materials etched in ICP tool by Dubreuil, Pascal, Belharet, Djaffar

“…Plasma impedance monitoring (PIM) based on electrical measurements is successfully used as an alternative to determine real time detection endpoint during…”
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Development and Characterization of Thinned PZT Bulk Technology Based Actuators Devoted to a 6-DOF Micropositioning Platform by Benouhiba, Amine, Belharet, Djaffar, Bienaime, Alex, Chalvet, Vincent, Rakotondrabe, Micky, Clevy, Cédric

“…"Piezoelectric actuators are widespread in the design of micro/nanorobotic tools and microsystems, as they have a very interesting electromechanical coupling…”
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Screening of spherical moulds manufactured isotropically in plasma etching conditions by Herth, Etienne, Belharet, Djaffar, Edmond, Samson, Bouville, David, Robert, Laurent, Lardet‐Vieudrun, Franck

“…Micro‐moulding is a critical rapid prototyping process chain used for a wide range of applications. This study demonstrates that it is possible to manufacture…”
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Lead-Free LiNbO 3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester by Barrientos, Gabriel, Clementi, Giacomo, Trigona, Carlo, Ouhabaz, Merieme, Gauthier-Manuel, Ludovic, Belharet, Djaffar, Margueron, Samuel, Bartasyte, Ausrine, Malandrino, Graziella, Baglio, Salvatore

“…In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO . The fabrication…”
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Oxide HDP-CVD Modeling for Shallow Trench Isolation by Roussy, A, Delachet, L, Belharet, D, Pinaton, J, Collot, P

“…A method is proposed to model the high-density plasma chemical vapor deposition step within the shallow trench isolation module in the CMOS technology. To…”
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Stabilized Pt Interdigitated Electrodes for High-Temperature SAW Sensors by De Sousa Lopes Moreira, Arthur, Bartasyte, Ausrine, Belharet, Diaffar, Soumann, Valerie, Margueron, Samuel, Broenner, Andreas

“…The standard working temperature of Surface Acoustic Wave (SAW) device does not exceed 150°C, although high-temperature device demand is increasing. Commonly,…”
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Bloch surface waves at the telecommunication wavelength with Lithium Niobate as top layer for integrated optics by Kovalevich, Tatiana, Belharet, Djaffar, Robert, Laurent, Ulliac, Gwenn, Kim, Myun-Sik, Herzig, Hans Peter, Grosjean, Thierry, Bernal, Maria-Pilar

“…Lithium niobate (LN) based devices are widely used in integrated and nonlinear optics. This material is robust and resistive to high temperatures, which makes…”
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Temporary adhesives for wafer bonding: Deep reactive ion etching application by Belharet, D., Dubreuil, P., Colin, D., Mazenq, L., Granier, H.

“…Deep reactive ion etching is a critical step for Micro-ElectroMechanical Systems devices fabrication (MEMS). Some applications are bulk silicon etching with…”
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