Search Results - "Behlert, Regine"
-
1
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications
Published in Micro (01-03-2024)“…Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic applications as well as for electrical purposes, e.g., as…”
Get full text
Journal Article -
2
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications
Published in Proceedings (01-08-2017)“…A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting…”
Get full text
Journal Article -
3
Inspired by Nature: Efficient Piezoelectric MEMS Actuator Based on Wavelike Excitation
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…Nature inspires engineers in many respects. Fish locomotion by undulation, e.g., constitutes an optimized technique for transferring momentum from a moving…”
Get full text
Conference Proceeding -
4
Evaluation of a Bionical Piezoelectric Micro-Flapper for Enhanced Fluid Flow Applying Numerical Simulations and Wavelet Transforms
Published in 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01-05-2019)“…We present a novel concept of a micropump that overcomes typical challenges such as size, integrability and plugging. It is based on the biological approach of…”
Get full text
Conference Proceeding -
5
Evaluation of the Electrode Design of an Integrated Bionic Microflapper for Improved Fluid Flow
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01-06-2020)“…Nature is often more resourceful than traditional technical approaches when it comes to finding efficient solutions to engineering problems. For example, the…”
Get full text
Conference Proceeding -
6
Enhanced Fluid Flow by Wavelike Excitation of a Micromechanical Bending Actuator
Published in 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01-03-2019)“…We present a study on a micromechanical bending actuator, which is intended for creating fluid flow by a fish-like, undulatory motion. This motion pattern…”
Get full text
Conference Proceeding -
7
Design of an integrated piezoelectric micro-flapper based on bionic principles
Published in 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01-05-2016)“…We present a novel micromachined piezoelectric actuator structure, which effects directed large area fluid transport on chip-level and is supposed to be used…”
Get full text
Conference Proceeding