Search Results - "Bazinette, Rémy"
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Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)“…Dense hydrogenated silicon nitride (SiNx:H) layers for photovoltaics are made by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition (AP‐PECVD). The…”
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Atmospheric Pressure Radio-Frequency DBD Deposition of Dense Silicon Dioxide Thin Film
Published in Plasma processes and polymers (01-10-2016)“…Radio‐frequency (RF) homogeneous dielectric barrier discharge (DBD) is compared to low frequency glow DBD to make silicon oxide from Ar/NH3/SiH4. RF‐DBD is a…”
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Transition from Townsend to radio-Frequency homogeneous dielectric barrier discharge in a Roll-to-Roll configuration
Published in Journal of applied geophysics (28-06-2016)“…The aim of this paper is to better understand the transition from Townsend to radio-frequency homogeneous dielectric barrier discharge (DBD) at atmospheric…”
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4
Hydrogenated Silicon Nitride SiN x :H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)Get full text
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Hydrogenated Silicon Nitride SiN sub(x):H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)“…Dense hydrogenated silicon nitride (SiN sub(x):H) layers for photovoltaics are made by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition…”
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