Search Results - "Baudrillart, Benoit"
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Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor
Published in Physica status solidi. A, Applications and materials science (01-11-2015)“…In this paper, we investigate a new distributed antenna array PECVD system, with 16 microwave plasma sources arranged in a 2D matrix, which enables the growth…”
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Investigation of Nucleation and Growth of Nanocrystalline Diamond Films Deposited at Low Temperature Using In Situ Laser Reflectance Interferometry
Published in Physica status solidi. A, Applications and materials science (01-11-2017)“…The nucleation and growth of nanocrystalline diamond (NCD) films deposited at low temperature on silicon substrates with a distributed antenna array (DAA)…”
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Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system
Published in Physica status solidi. A, Applications and materials science (01-10-2016)“…The growth of nanocrystalline diamond (NCD) films on Si3N4 ceramic substrates at low surface temperature using a distributed antenna array plasma‐enhanced…”
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Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors
Published in 2017 IEEE SENSORS (01-10-2017)“…This paper studies the Diamond/ZnO/LiNbO 3 structure, numerically and experimentally, as a candidate for a packageless sensor based on the surface acoustic…”
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