Gallium colloid formation during ion implantation of glass

Gallium colloid formation during ion implantation of glass

Data are reported on the size and depth distribution of gallium colloids formed by gallium ion implantation at energies of 50 and 60 keV, and nominal doses up to 1.1 × 10 17 ions/cm 2 into coverlip glass, float glass and white crown glass. Measurement techniques used to reveal colloid-induced change...

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Bibliographic Details
Published in:Journal of non-crystalline solids Vol. 180; no. 2; pp. 266 - 274
Main Authors: Hole, D.E., Townsend, P.D., Barton, J.D., Nistor, L.C., Van Landuyt, J.
Format: Journal Article
Language:English
Published: Amsterdam Elsevier B.V 1995
Elsevier
Subjects:
Condensed matter: structure, mechanical and thermal properties
Defects and impurities in crystals; microstructure
Doping and impurity implantation in other materials
Exact sciences and technology
Physics
Structure of solids and liquids; crystallography
Ion implantation
RBS
Glass
Defect clusters
Silicates
Experimental study
Gallium additions
Impurities
Float glass
Optical reflection
Depth profiles
TEM
Optical glass
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Summary:Data are reported on the size and depth distribution of gallium colloids formed by gallium ion implantation at energies of 50 and 60 keV, and nominal doses up to 1.1 × 10 17 ions/cm 2 into coverlip glass, float glass and white crown glass. Measurement techniques used to reveal colloid-induced changes include the wavelength dependence of optical reflectivity, transmission electron microscopy (TEM) and Rutherford backscattering (RBS). The reflectivity can be controlled by variations in ion dose, implant temperature and ion beam energy. The highest reflectivity is found after implants near 50°C and the level is extremely sensitive to the implant temperature. For controlled beam conditions, the reflectivity data are reproducible, despite there being variations in the colloid size and depth distributions as seen by TEM and RBS. The TEM data reveal that the depth distribution develops in two distinct regions, which at high concentration can precipitate into two layers of large colloids. Subsidiary experiments are reported to attempt to separate the effects of variations in the implant temperature and surface charging which influence the reflectivity, RBS and colloid formation.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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content type line 23
ISSN:0022-3093
1873-4812
DOI:10.1016/0022-3093(94)00477-3