Search Results - "Bandorf, R."

Magnetron sputtering – Milestones of 30 years by Bräuer, G., Szyszka, B., Vergöhl, M., Bandorf, R.

“…Since the introduction of the planar magnetron by J.S. Chapin in 1974 magnetron sputtering has become the most important technology for the deposition of thin…”
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Material structure and piezoresistive properties of niobium containing diamond-like-carbon films by Grein, M., Bandorf, R., Schiffmann, K., Bräuer, G.

“…Niobium-containing diamond-like carbon (Nb-DLC) films were deposited in a reactive high power impulse magnetron sputtering (HIPIMS) process, using a niobium…”
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HIPIMS ITO films from a rotating cylindrical cathode by Carreri, F.C., Sabelfeld, A., Gerdes, H., Bandorf, R., Vergöhl, M., Bräuer, G.

“…High power impulse magnetron sputtering (HIPIMS) allows the deposition of thin films from plasmas with high metallic ion content. For several applications,…”
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Direct metallization of PMMA with aluminum films using HIPIMS by Bandorf, R., Waschke, S., Carreri, F.C., Vergöhl, M., Grundmeier, G., Bräuer, G.

“…Ionized sputtering like high power impulse magnetron sputtering HIPIMS opens new horizons for cost effective, environmental friendly plastic metallization with…”
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Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator by Papa, F., Gerdes, H., Bandorf, R., Ehiasarian, A.P., Kolev, I., Braeuer, G., Tietema, R., Krug, T.

“…High power impulse magnetron sputtering (HIPIMS) pulses have been of great interest over the last decade. With such sputtering techniques a substantial amount…”
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Diamond-like carbon films as piezoresistors in highly sensitive force sensors by Petersen, M., Bandorf, R., Bräuer, G., Klages, C.-P.

“…Diamond-like carbon (DLC) films have a high potential as piezoresistors in sensors for microtechnology applications. Since it has been reported that some films…”
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Micro force sensor with piezoresistive amorphous carbon strain gauge by Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.

“…In this contribution we report for the first time on the successful integration of amorphous carbon (a-C) as a piezoresistive strain gauge into a silicon micro…”
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Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films by Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.

“…In this paper we report on the electrical and optical properties of amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) films. Resistivity of both…”
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Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films by Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.

“…We report a large piezoresistive effect of the plasma assisted chemical vapor deposited hydrogenated amorphous carbon (a-C:H) films deposited at bias voltages…”
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Influencing factors on microtribology of DLC films for MEMS and microactuators by Bandorf, R., Lüthje, H., Staedler, T.

“…Due to the low coefficient of friction and the high hardness of diamond-like carbon films they are very interesting for application of microtribological…”
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Hard and soft magnetic materials for electromagnetic microactuators by Bedenbecker, M., Bandorf, R., Bräuer, G., Lüthje, H., Gatzen, H. H.

“…An important aspect of the development of electromagnetic microactuators is the search for suitable materials as well as the development of the respective…”
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Influence of substrate material and topography on the tribological behaviour of submicron coatings by Bandorf, R., Lüthje, H., Wortmann, A., Staedler, T., Wittorf, R.

“…Submicron diamond-like carbon films (DLC) were prepared on substrate materials with different Young's modulus (silicon, glass, polymers) by PACVD using a Ar/C…”
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Tribological behaviour of thin a-C and a-C:H films with different topographic structure under rotating and oscillating motion for dry lubrication by Bandorf, Ralf, Lüthje, Holger, Henke, Cord, Sick, Jan-Hinrich, Küster, Rolf

“…Fluid lubrication can hardly be realized for microparts and MEMS components. Therefore, coatings with low friction will be applied. Due to the small size of…”
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Development and fabrication of magnetic thin films by BEDENBECKER, M, BANDORF, R, LUETHJE, H, BRAEUER, G, GATZEN, H. H

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Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators by Paulkowski, D., Bandorf, R., Achilles, S., Pape, F., Gatzen, H. H., Bräuer, G.

“…Minimizing wear and friction in the contact area of the sliding parts of Micro‐Electro‐ Mechanical System (MEMS) components is of utmost importance for the…”
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Smart Coatings for Intelligent Surfaces by Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.

“…The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist…”
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Tribology of microsystems by KÜSTER, R, BANDORF, R, HENKE, C, LÜTHJE, H, SICK, J.-H, NEUMEISTER, C, PHATARALAOHA, A, BÜTTGENBACH, S, GATZEN, H. H, BRÄUER, G

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Gas flow sputtering for manufacture of high quality hard magnetic films by Bandorf, R., Gröninger, A., Ortner, K., Gerdes, H., Bräuer, G.

“…Sputter deposition of magnetic material provides some challenges. In the case of soft magnetic materials, usually thin targets and strong magnetic arrays of…”
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Sub-micron coatings with low friction and wear for micro actuators by BANDORF, R, LÜTHJE, H, SCHIFFMANN, K, STAEDLER, T, WORTMANN, A

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Submicron coatings for micro-tribological applications by BANDORF, R, LÜTHJE, H, SCHIFFMANN, K, BECK, M, GATZEN, H. H, SCHMIDT, M, BÜTTGENBACH, S, BRÄUER, G

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