Search Results - "Bancu, M. G."

Single-crystal silicon micromirror array with polysilicon flexures by Kudrle, T.D., Wang, C.C., Bancu, M.G., Hsiao, J.C., Pareek, A., Waelti, M., Kirkos, G.A., Shone, T., Fung, C.D., Mastrangelo, C.H.

“…High-density micromirror arrays (1296 mirrors) have been fabricated with a process that combines the benefits of both bulk and surface micromachining. Arrays…”
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Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes by Kudrle, T.D., Shedd, G.M., Wang, C.C., Hsiao, J.C., Bancu, M.G., Kirkos, G.A., Yazdi, N., Waelti, M., Sane, H., Mastrangelo, C.H.

“…In this paper we introduce a new electrostatic actuator that provides a large increase in neutral position (no rotation) torque and suppression of pull-in…”
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LiDAR Beamsteering by Digitally Switched MEMS Gratings on a Silicon Photonics Platform by Spector, S. J., Cook, E. H., Moebius, M. G., Baruffi, F. A., Bancu, M. G., Benney, L. D., Byrnes, S. J., Chesin, J. P., Geiger, S. J., Goldman, D. A., Hare, A. E., Lane, B. F., Sawyer, W. D., Bessette, C. R.

“…A new method for solid-state beamsteering using MEMS grating switches integrated on a Si-PIC has been demonstrated. This method provides fast random access…”
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Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques by Kudrle, T.D., Wang, C.C., Bancu, M.G., Hsiao, J.C., Pareek, A., Waelti, M., Kirkos, G.A., Shone, T., Fung, C.D., Mastrangelo, C.H.

“…High-density micromirror arrays have been fabricated with a process that combines the benefits of both bulk and surface micromachining. Arrays fabricated with…”
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