Electromigration-Induced Plastic Deformation in Cu Interconnects: Effects on Current Density Exponent, n, and Implications for EM Reliability Assessment

Electromigration-Induced Plastic Deformation in Cu Interconnects: Effects on Current Density Exponent, n, and Implications for EM Reliability Assessment

While Black’s equation for electromigration (EM) in interconnects with n  = 1 is rigorously based on the principles of electrotransport, n  > 1 is more commonly observed empirically. This deviation is usually attributed to Joule heating. An alternative explanation is suggested by the recent disco...

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Bibliographic Details
Published in:Journal of electronic materials Vol. 39; no. 11; pp. 2483 - 2488
Main Authors: Budiman, A.S., Hau-Riege, C.S., Baek, W.C., Lor, C., Huang, A., Kim, H.S., Neubauer, G., Pak, J., Besser, P.R., Nix, W.D.
Format: Journal Article
Language:English
Published: Boston Springer US 01-11-2010
Springer
Springer Nature B.V
Subjects:
Applied sciences
Characterization and Evaluation of Materials
Chemistry and Materials Science
Condensed matter: structure, mechanical and thermal properties
Copper
Cross-disciplinary physics: materials science; rheology
Deformation, plasticity, and creep
Diffusion in solids
Electromigration
Electronics
Electronics and Microelectronics
Exact sciences and technology
Instrumentation
Interconnect
Materials
Materials Science
Optical and Electronic Materials
Physics
Solid State Physics
Superplasticity
Transport properties of condensed matter (nonelectronic)
Treatment of materials and its effects on microstructure and properties
Electromigration
plasticity
current density exponent
Electrical conductivity
High density
Joule heating
Plasticity
Electrodiffusion
Plastic deformation
High temperature
Reliability
Current density
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Summary:While Black’s equation for electromigration (EM) in interconnects with n  = 1 is rigorously based on the principles of electrotransport, n  > 1 is more commonly observed empirically. This deviation is usually attributed to Joule heating. An alternative explanation is suggested by the recent discovery of EM plasticity. To examine this possibility, we have retested samples that had been previously subjected to a predamaging phase of high temperature and current densities to determine whether the loss of median time to failure (MTF) is retained. We find that the predamaged samples exhibit MTFs that are permanently reduced, which is a characteristic of EM plasticity.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-010-1356-4