Search Results - "Badalyan, AM"

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    Plasma Deposition and Properties of Silicon Carbonitride Films by Smirnova, T. P., Badalyan, A. M., Borisov, V. O., Kaichev, V. V., Bakhturova, L. F., Kichai, V. N., Rakhlin, V. I., Shainyan, B. A.

    Published in Inorganic materials (01-07-2005)
    “…A variety of advanced analytical techniques were used to characterize silicon carbonitride films grown from new volatile nitrogen-rich silyl derivatives of…”
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    Journal Article
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