Search Results - "Bacuita, Terence"

Exposing extreme ultraviolet lithography at Intel by Roberts, Jeanette, Bacuita, Terence, Bristol, Robert L., Cao, Heidi, Chandhok, Manish, Lee, Sang H., Leeson, Michael, Liang, Ted, Panning, Eric, Rice, Bryan J., Shah, Uday, Shell, Melissa, Yueh, Wang, Zhang, Guojing

“…In this paper we present the latest results on developing and integrating extreme ultraviolet lithography (EUVL) at Intel. The world’s first commercial EUV…”
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Effects of flare in extreme ultraviolet lithography: Learning from the engineering test standa by Chandhok, Manish, Lee, Sang H., Bacuita, Terence

“…One of the technical challenges for introducing extreme ultraviolet lithography (13.5 nm) into high volume manufacturing is flare. Flare reduces aerial image…”
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