Search Results - "Babayan, S.E."
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The atmospheric-pressure plasma jet: a review and comparison to other plasma sources
Published in IEEE transactions on plasma science (01-12-1998)“…Atmospheric-pressure plasmas are used in a variety of materials processes. Traditional sources include transferred arcs, plasma torches, corona discharges, and…”
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Etching polyimide with a nonequilibrium atmospheric-pressure plasma jet
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-09-1999)“…An atmospheric-pressure plasma jet has been used to etch polyimide films at 1.0–8.0±0.2 μ m/min at 760 Torr and between 50 and 250 °C. The plasma was produced…”
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Etching of uranium oxide with a non-thermal, atmospheric pressure plasma
Published in Journal of nuclear materials (15-01-2004)“…The etching of uranium oxide films was investigated with a non-thermal, atmospheric pressure plasma fed with a mixture of 2.0 kPa carbon tetrafluoride, 880.0…”
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Characterization of the Active Species in the Afterglow of a Nitrogen and Helium Atmospheric-Pressure Plasma
Published in Plasma chemistry and plasma processing (01-06-2002)Get full text
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Tantalum etching with a nonthermal atmospheric-pressure plasma
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-11-2000)“…Tantalum was etched in a downstream, atmospheric-pressure plasma. In this process, etching occurred without significant ion bombardment. An etching rate of…”
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