Search Results - "BELLUR, K. R"
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1
Low parasitic resistance contacts for scaled ULSI devices
Published in Thin solid films (02-11-1998)“…Unless contact resistivity is reduced, the contact resistance ultimately becomes higher than the channel resistance and becomes useless in modern day devices…”
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Conference Proceeding Journal Article -
2
Phase evolution and annealing effects on the electrical properties of Pb(Zr0.53Ti0.47)O3 thin films with RuO2 electrodes
Published in Thin solid films (01-02-1995)Get full text
Journal Article -
3
Influence of platinum interlayers on the electrical properties of RuO2/Pb(Zr0.53Ti0.47)O3/RuO2 capacitor heterostructures
Published in Applied physics letters (09-01-1995)“…Lead zirconate titanate, Pb(ZrxTi1−x)O3 or PZT, thin films grown on RuO2 electrodes by the sol-gel process have excellent resistance to polarization fatigue,…”
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Journal Article -
4
Contribution of electrodes and microstructures to the electrical properties of Pb(Zr 0.53 Ti 0.47 )O 3 thin film capacitors
Published in Journal of materials research (01-11-1994)“…Pb(Zr 0.53 Ti 0.47 )O 3 (PZT) thin film capacitors have been fabricated with four electrode combinations: Pt /PZT/ Pt /SiO 2 Si, RuO 2 /PZT/ Pt /SiO 2 /Si, RuO…”
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Journal Article -
5
Electrical characterization of sol-gel derived PZT thin films
Published in ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics (1992)“…Thin films of lead zirconate titanate (PZT) were deposited on a variety of substrates using the sol-gel process. These included Pt/Ti/SiO/sub 2//Si, RuO/sub…”
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Conference Proceeding -
6
Phase evolution and annealing effects on the electrical properties of Pb(Zr sub(0.53)Ti sub(0.47))O sub(3) thin films with RuO sub(2) electrodes
Published in Thin solid films (01-01-1995)“…The electrical properties and crystallization of Pb(Zr sub(0.53)Ti sub(0.47))O sub(3) (PZT) thin films grown on RuO sub(2) electrodes by the sol-gel process…”
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Journal Article