Schottky barrier height studies of Au/4H-SiC(0001) using photoemission and synchrotron radiation
The Schottky barrier height (SBH) of Au on 4H-SiC(0001) has been studied using photoemission and synchrotron radiation. The Au was deposited in-situ on clean and well-ordered 3 x 3 R30 degrees reconstructed SiC surfaces prepared by in situ heating at approximately 950 C. The SBH was determined from...
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Published in: | Journal of electronic materials Vol. 31; no. 12; pp. 1353 - 1356 |
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Main Authors: | , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
New York, NY
Institute of Electrical and Electronics Engineers
01-12-2002
Springer Nature B.V |
Subjects: | |
Online Access: | Get full text |
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Summary: | The Schottky barrier height (SBH) of Au on 4H-SiC(0001) has been studied using photoemission and synchrotron radiation. The Au was deposited in-situ on clean and well-ordered 3 x 3 R30 degrees reconstructed SiC surfaces prepared by in situ heating at approximately 950 C. The SBH was determined from the shift observed in the Si 2p core level, in addition to the initial band bending determined for the clean surface. The results were compared with values obtained by electrical, C-V, and I-V characterization methods. A favorable comparison between the three independent, SBH determination methods was found. 13 refs. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0361-5235 1543-186X 1543-186X |
DOI: | 10.1007/s11664-002-0121-8 |