Schottky barrier height studies of Au/4H-SiC(0001) using photoemission and synchrotron radiation

The Schottky barrier height (SBH) of Au on 4H-SiC(0001) has been studied using photoemission and synchrotron radiation. The Au was deposited in-situ on clean and well-ordered 3 x 3 R30 degrees reconstructed SiC surfaces prepared by in situ heating at approximately 950 C. The SBH was determined from...

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Bibliographic Details
Published in:Journal of electronic materials Vol. 31; no. 12; pp. 1353 - 1356
Main Authors: VIROJANADARA, C, GLANS, P.-A, BALASUBRUMNIAN, T, JOHANSSON, L. I, MACAK, E. B, WAHAB, Q, MADSEN, L. D
Format: Journal Article
Language:English
Published: New York, NY Institute of Electrical and Electronics Engineers 01-12-2002
Springer Nature B.V
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Summary:The Schottky barrier height (SBH) of Au on 4H-SiC(0001) has been studied using photoemission and synchrotron radiation. The Au was deposited in-situ on clean and well-ordered 3 x 3 R30 degrees reconstructed SiC surfaces prepared by in situ heating at approximately 950 C. The SBH was determined from the shift observed in the Si 2p core level, in addition to the initial band bending determined for the clean surface. The results were compared with values obtained by electrical, C-V, and I-V characterization methods. A favorable comparison between the three independent, SBH determination methods was found. 13 refs.
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ISSN:0361-5235
1543-186X
1543-186X
DOI:10.1007/s11664-002-0121-8