Search Results - "Azarov, Alexander Yu"
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Cubic silicon carbide as a potential photovoltaic material
Published in Solar energy materials and solar cells (01-02-2016)“…In this work we present a significant advancement in cubic silicon carbide (3C-SiC) growth in terms of crystal quality and domain size, and indicate its…”
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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Published in Applied surface science (15-10-2017)“…[Display omitted] •The in vacuo angle resolved XPS was applied to study ALD Ru growth.•Influence of plasma treatment of substrate on Ru nucleation process was…”
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Annealing of ion implanted 4H-SiC in the temperature range of 100-800 degrees C analysed by ion beam techniques
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-06-2010)“…Ion implantation induced damage formation and subsequent annealing in 4H-SiC in the temperature range of 100-800 degrees C has been investigated. Silicon…”
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Influence of ion irradiation on internal residual stress in DLC films
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-10-2010)“…The dependence of internal residual stress in thin diamond-like carbon films grown on Si substrate by PECVD technique on most important growth parameters,…”
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