Search Results - "Azarov, Alexander Yu"

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    Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy by Egorov, Konstantin V., Lebedinskii, Yury Yu, Soloviev, Anatoly A., Chouprik, Anastasia A., Azarov, Alexander Yu, Markeev, Andrey M.

    Published in Applied surface science (15-10-2017)
    “…[Display omitted] •The in vacuo angle resolved XPS was applied to study ALD Ru growth.•Influence of plasma treatment of substrate on Ru nucleation process was…”
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    Journal Article
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    Annealing of ion implanted 4H-SiC in the temperature range of 100-800 degrees C analysed by ion beam techniques by Usman, Mohammad, Nour, Magzoub, Azarov, Alexander Yu, Hallén, Anders

    “…Ion implantation induced damage formation and subsequent annealing in 4H-SiC in the temperature range of 100-800 degrees C has been investigated. Silicon…”
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    Journal Article
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