Search Results - "Ayerden, N. Pelin"
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Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy
Published in Sensors (Basel, Switzerland) (06-09-2017)“…Increasing demand for field instruments designed to measure gas composition has strongly promoted the development of robust, miniaturized and low-cost handheld…”
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Journal Article -
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Compact gas cell integrated with a linear variable optical filter
Published in Optics express (08-02-2016)“…A miniaturized methane (CH(4)) sensor based on nondispersive infrared absorption is realized in MEMS technology. A high level of functional integration is…”
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Journal Article -
3
The Miniaturization of an Optical Absorption Spectrometer for Smart Sensing of Natural Gas
Published in IEEE transactions on industrial electronics (1982) (01-12-2017)“…Natural gas is the primary energy resource in both households and industry. Due to the molecular similarity of the main constituents, i.e., hydrocarbons,…”
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Journal Article -
4
Lamellar-Grating-Based MEMS Fourier Transform Spectrometer
Published in Journal of microelectromechanical systems (01-04-2012)“…Design, fabrication, and characterization of a high-performance micromachined lamellar-grating-interferometer-based Fourier transform spectrometer are…”
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Journal Article -
5
A miniaturized optical gas-composition sensor with integrated sample chamber
Published in Sensors and actuators. B, Chemical (29-11-2016)“…•A miniaturized optical gas sensor based on absorption spectroscopy is presented.•The resonator cavity of an LVOF can also be used as a gas chamber.•The Fizeau…”
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Journal Article -
6
Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers
Published in Proceedings (01-08-2017)“…Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patterns. Results in literature are usually based on structures…”
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Journal Article -
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How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01-06-2017)“…The biggest challenge in the miniaturization of spectrometers is achieving high sensitivity and resolving power at reduced device dimensions. The gas-filled…”
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Conference Proceeding -
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A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
Published in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2017)“…This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where…”
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Conference Proceeding -
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MEMS Fourier Transform Spectrometer
Published in 2011 XXXth URSI General Assembly and Scientific Symposium (01-08-2011)“…A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The…”
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Conference Proceeding -
10
MEMS FTIR spectrometer and optical results
Published in 2012 International Conference on Optical MEMS and Nanophotonics (01-08-2012)“…MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >;500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical…”
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Conference Proceeding -
11
Lamellar grating based MEMS Fourier Transform Spectrometer
Published in 2010 International Conference on Optical MEMS and Nanophotonics (01-08-2010)“…A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device…”
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Conference Proceeding -
12
MEMS Fourier transform IR spectrometer
Published in 16th International Conference on Optical MEMS and Nanophotonics (01-08-2011)“…A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm 2 is developed. Laser and IR interferograms…”
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Conference Proceeding